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Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Aarik, J. / Aidla, A. / Mandar, H. / Uustare, T. / Kukli, K. / Schuisky, M.

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Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Aarik, J. / Aidla, A. / Mandar, H. / Uustare, T. / Kukli, K. / Schuisky, M.

Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Aarik, J. / Aidla, A. / Mandar, H. / Uustare, T. / Kukli, K. / Schuisky, M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Contributors:

Aarik, J. (author) / Aidla, A. (author) / Mandar, H. (author) / Uustare, T. (author) / Kukli, K. (author) / Schuisky, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 173 ; 15-21

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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