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Action mechanism of hydrogen gas on deposition of HfC coating using HfCl4-CH4-H2-Ar system
Action mechanism of hydrogen gas on deposition of HfC coating using HfCl4-CH4-H2-Ar system
Action mechanism of hydrogen gas on deposition of HfC coating using HfCl4-CH4-H2-Ar system
Wang, Yalei (author) / Li, Zehao (author) / Xiong, Xiang (author) / Li, Xiaobin (author) / Chen, Zhaoke (author) / Sun, Wei (author)
Applied surface science ; 390 ; 903-908
2016-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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