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Optimal process parameters for phosphorus spin-on-doping of germanium

Boldrini, Virginia / Carturan, Sara Maria / Maggioni, Gianluigi / Napolitani, Enrico / Napoli, Daniel Ricardo / Camattari, Riccardo / De Salvador, Davide

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Optimal process parameters for phosphorus spin-on-doping of germanium

Boldrini, Virginia / Carturan, Sara Maria / Maggioni, Gianluigi / Napolitani, Enrico / Napoli, Daniel Ricardo / Camattari, Riccardo / De Salvador, Davide

Optimal process parameters for phosphorus spin-on-doping of germanium

Boldrini, Virginia / Carturan, Sara Maria / Maggioni, Gianluigi / Napolitani, Enrico / Napoli, Daniel Ricardo / Camattari, Riccardo / De Salvador, Davide

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Optimal process parameters for phosphorus spin-on-doping of germanium

Contributors:

Boldrini, Virginia (author) / Carturan, Sara Maria (author) / Maggioni, Gianluigi (author) / Napolitani, Enrico (author) / Napoli, Daniel Ricardo (author) / Camattari, Riccardo (author) / De Salvador, Davide (author)

Published in:

Applied surface science ; 392 ; 1173-1180

Publication date:

2017-01-01

Size:

8 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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