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Diffusion and activation of phosphorus in germanium

Tsouroutas, P. / Tsoukalas, D. / Zergioti, I. / Cherkashin, N. / Claverie, A.

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Diffusion and activation of phosphorus in germanium

Tsouroutas, P. / Tsoukalas, D. / Zergioti, I. / Cherkashin, N. / Claverie, A.

Diffusion and activation of phosphorus in germanium

Tsouroutas, P. / Tsoukalas, D. / Zergioti, I. / Cherkashin, N. / Claverie, A.

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Order at Subito €

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Document information

Title:

Diffusion and activation of phosphorus in germanium

Contributors:

Tsouroutas, P. (author) / Tsoukalas, D. (author) / Zergioti, I. (author) / Cherkashin, N. (author) / Claverie, A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 11 ; 372-377

Publication date:

2008-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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