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Diffusion and activation of phosphorus in germanium
Diffusion and activation of phosphorus in germanium
Diffusion and activation of phosphorus in germanium
Tsouroutas, P. (author) / Tsoukalas, D. (author) / Zergioti, I. (author) / Cherkashin, N. (author) / Claverie, A. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 11 ; 372-377
2008-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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