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Diffusion of phosphorus implanted in germanium

Canneaux, T. / Mathiot, D. / Ponpon, J. P. / Roques, S. / Schmitt, S. / Dubois, C.

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Diffusion of phosphorus implanted in germanium

Canneaux, T. / Mathiot, D. / Ponpon, J. P. / Roques, S. / Schmitt, S. / Dubois, C.

Diffusion of phosphorus implanted in germanium

Canneaux, T. / Mathiot, D. / Ponpon, J. P. / Roques, S. / Schmitt, S. / Dubois, C.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Diffusion of phosphorus implanted in germanium

Contributors:

Canneaux, T. (author) / Mathiot, D. (author) / Ponpon, J. P. (author) / Roques, S. (author) / Schmitt, S. (author) / Dubois, C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 68-71

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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