Comparative investigation of Si-C-N Films prepared by plasma enhanced chemical vapour deposition and magnetron sputtering: Fid-Bau Portal

Comparative investigation of Si-C-N Films prepared by plasma enhanced chemical vapour deposition and magnetron sputtering

Kozak, A.O. / Porada, O.K. / Ivashchenko, V.I. / Ivashchenko, L.A. / Scrynskyy, P.L. / Tomila, T.V. / Manzhara, V.S.

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Comparative investigation of Si-C-N Films prepared by plasma enhanced chemical vapour deposition and magnetron sputtering

Kozak, A.O. / Porada, O.K. / Ivashchenko, V.I. / Ivashchenko, L.A. / Scrynskyy, P.L. / Tomila, T.V. / Manzhara, V.S.

Comparative investigation of Si-C-N Films prepared by plasma enhanced chemical vapour deposition and magnetron sputtering

Kozak, A.O. / Porada, O.K. / Ivashchenko, V.I. / Ivashchenko, L.A. / Scrynskyy, P.L. / Tomila, T.V. / Manzhara, V.S.

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Document information

Title:

Comparative investigation of Si-C-N Films prepared by plasma enhanced chemical vapour deposition and magnetron sputtering

Contributors:

Kozak, A.O. (author) / Porada, O.K. (author) / Ivashchenko, V.I. (author) / Ivashchenko, L.A. (author) / Scrynskyy, P.L. (author) / Tomila, T.V. (author) / Manzhara, V.S. (author)

Published in:

Applied surface science ; 425 ; 646-653

Publication date:

2017-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

Lee, C. H. / Wu, C. T. / Pueng, C. Y. | British Library Online Contents | 1992

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Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2006

Microstructure of thin films prepared by plasma-enhanced chemical vapour deposition of helium-diluted silane

Carabe, J. / Ganda, J.J. / Gonzalez, N. et al. | British Library Online Contents | 1999

Structure and mechanical properties of Zr/TiAlN films prepared by plasma-enhanced magnetron sputtering

Xian, G. / Zhao, H. B. / Fan, H. Y. et al. | British Library Online Contents | 2015

Rough Bioglass Films Prepared by Magnetron Sputtering

Slav, A. / Ianculescu, A. / Morosanu, C. et al. | British Library Online Contents | 2008