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    Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures

    New search for: Fischeneder, M.
    New search for: Wistrela, E.
    New search for: Bittner, A.
    New search for: Schneider, M.
    New search for: Schmid, U.

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    Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures

    New search for: Fischeneder, M.
    New search for: Wistrela, E.
    New search for: Bittner, A.
    New search for: Schneider, M.
    New search for: Schmid, U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures

    New search for: Fischeneder, M.
    New search for: Wistrela, E.
    New search for: Bittner, A.
    New search for: Schneider, M.
    New search for: Schmid, U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures

    Contributors:

    Fischeneder, M. (author) / Wistrela, E. (author) / Bittner, A. (author) / Schneider, M. (author) / Schmid, U. (author)

    Published in:

    Materials science in semiconductor processing ; 71 ; 283-289

    Publication date:

    2017-01-01

    Size:

    7 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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