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    Improved interface and electrical properties of atomic layer deposited Al2O3/4H-SiC

    New search for: Suvanam, Sethu Saveda
    New search for: Usman, Muhammed
    New search for: Martin, David
    New search for: Yazdi, Milad. G.
    New search for: Linnarsson, Margareta
    New search for: Tempez, Agnès
    New search for: Götelid, Mats
    New search for: Hallén, Anders

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    Improved interface and electrical properties of atomic layer deposited Al2O3/4H-SiC

    New search for: Suvanam, Sethu Saveda
    New search for: Usman, Muhammed
    New search for: Martin, David
    New search for: Yazdi, Milad. G.
    New search for: Linnarsson, Margareta
    New search for: Tempez, Agnès
    New search for: Götelid, Mats
    New search for: Hallén, Anders

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Improved interface and electrical properties of atomic layer deposited Al2O3/4H-SiC

    New search for: Suvanam, Sethu Saveda
    New search for: Usman, Muhammed
    New search for: Martin, David
    New search for: Yazdi, Milad. G.
    New search for: Linnarsson, Margareta
    New search for: Tempez, Agnès
    New search for: Götelid, Mats
    New search for: Hallén, Anders

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Improved interface and electrical properties of atomic layer deposited Al2O3/4H-SiC

    Contributors:

    Suvanam, Sethu Saveda (author) / Usman, Muhammed (author) / Martin, David (author) / Yazdi, Milad. G. (author) / Linnarsson, Margareta (author) / Tempez, Agnès (author) / Götelid, Mats (author) / Hallén, Anders (author)

    Published in:

    Applied surface science ; 433 ; 108-115

    Publication date:

    2018-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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