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Rapid, deep dopant diffusion in crystalline silicon by laser-induced surface melting
Rapid, deep dopant diffusion in crystalline silicon by laser-induced surface melting
Rapid, deep dopant diffusion in crystalline silicon by laser-induced surface melting
Zhou, Zibo (author) / Perez-Wurfl, Ivan (author) / Simonds, Brian J. (author)
Materials science in semiconductor processing ; 86 ; 8-17
2018-01-01
10 pages
Article (Journal)
English
DDC:
621.38152
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