Synergetic effect of organic cores and inorganic shells for core/shell structured composite abrasives for chemical mechanical planarization

Chen, Y. / Li, Z. / Miao, N. | British Library Online Contents | 2014

Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance

Chen, Y. / Li, Z. / Qin, J. et al. | British Library Online Contents | 2016

Compressive elastic moduli and polishing performance of non-rigid core/shell structured PS/SiO"2 composite abrasives evaluated by AFM

Chen, A. / Mu, W. / Chen, Y. | British Library Online Contents | 2014

Chemical mechanical planarization of copper pH effect

Du, T. / Desai, V. | British Library Online Contents | 2003

Planarization machining of sapphire wafers with boron carbide and colloidal silica as abrasives

Hu, X. / Song, Z. / Pan, Z. et al. | British Library Online Contents | 2009