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    Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

    New search for: Yoon, Sung-Soo
    New search for: Lee, Yeong Bahl
    New search for: Khang, Dahl-Young

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    Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

    New search for: Yoon, Sung-Soo
    New search for: Lee, Yeong Bahl
    New search for: Khang, Dahl-Young

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

    New search for: Yoon, Sung-Soo
    New search for: Lee, Yeong Bahl
    New search for: Khang, Dahl-Young

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

    Contributors:

    Yoon, Sung-Soo (author) / Lee, Yeong Bahl (author) / Khang, Dahl-Young (author)

    Published in:

    Applied surface science ; 370 ; 117-125

    Publication date:

    2016-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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