Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching: Fid-Bau Portal

Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

Yoon, S. S. / Lee, Y. B. / Khang, D. Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

Yoon, S. S. / Lee, Y. B. / Khang, D. Y.

Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

Yoon, S. S. / Lee, Y. B. / Khang, D. Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

Contributors:

Yoon, S. S. (author) / Lee, Y. B. (author) / Khang, D. Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 370 ; 117-125

Publication date:

2016-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Yoon, Sung-Soo / Lee, Yeong Bahl / Khang, Dahl-Young | British Library Online Contents | 2016

Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

Yoon, Sung-Soo / Lee, Yeong Bahl / Khang, Dahl-Young | British Library Online Contents | 2016

ETCHANT COMPOSITION FOR ETCHING METAL LAYER

KIM SEONG MIN / YOO JAE SUNG / LEE EUN JUNG | European Patent Office | 2018

Free access

Porous GaN photoelectrode fabricated by photo-assisted electrochemical etching using ionic liquid as etchant

Zhang, Miao-Rong / Qin, Shuang-Jiao / Peng, Hong-Dan et al. | British Library Online Contents | 2016

Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching

Rajan, N. / Zorman, C. A. / Mehregany, M. | British Library Online Contents | 2000