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    Nickel mono-silicide formation using a photo-thermal process assisted by ultra-violet laser

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    Nickel mono-silicide formation using a photo-thermal process assisted by ultra-violet laser

    New search for: Jung, Sang Min
    New search for: Kim, Jin Hwan
    New search for: Park, Chul Jin
    New search for: Shin, Moo Whan

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nickel mono-silicide formation using a photo-thermal process assisted by ultra-violet laser

    New search for: Jung, Sang Min
    New search for: Kim, Jin Hwan
    New search for: Park, Chul Jin
    New search for: Shin, Moo Whan

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Nickel mono-silicide formation using a photo-thermal process assisted by ultra-violet laser

    Contributors:

    Jung, Sang Min (author) / Kim, Jin Hwan (author) / Park, Chul Jin (author) / Shin, Moo Whan (author)

    Published in:

    Materials science in semiconductor processing ; 75 ; 263-268

    Publication date:

    2018-01-01

    Size:

    6 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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