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Effect of number of laser pulses on p+/n silicon ultra-shallow junction formation during non-melt ultra-violet laser thermal annealing
Effect of number of laser pulses on p+/n silicon ultra-shallow junction formation during non-melt ultra-violet laser thermal annealing
Effect of number of laser pulses on p+/n silicon ultra-shallow junction formation during non-melt ultra-violet laser thermal annealing
Jung, Sang Min (author) / Park, Chul Jin (author) / Jeong, Hongsik (author) / Shin, Moo Whan (author)
Materials science in semiconductor processing ; 60 ; 34-39
2017-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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