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    Chemical-mechanical polishing of copper using molybdenum dioxide slurry

    New search for: Hegde, S.
    New search for: Patri, U. B.
    New search for: Babu, S. V.

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    Chemical-mechanical polishing of copper using molybdenum dioxide slurry

    New search for: Hegde, S.
    New search for: Patri, U. B.
    New search for: Babu, S. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical-mechanical polishing of copper using molybdenum dioxide slurry

    New search for: Hegde, S.
    New search for: Patri, U. B.
    New search for: Babu, S. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Chemical-mechanical polishing of copper using molybdenum dioxide slurry

    Contributors:

    Hegde, S. (author) / Patri, U. B. (author) / Babu, S. V. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 20 ; 2553-2561

    Publication date:

    2005-01-01

    Size:

    9 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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