Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Sputter deposition of nitride coatings in oxygen–contaminated sputter atmospheres

    New search for: Jehn, Hermann A.
    New search for: Fromm, Eckehard
    New search for: Hofmann, Siegfried

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Sputter deposition of nitride coatings in oxygen–contaminated sputter atmospheres

    New search for: Jehn, Hermann A.
    New search for: Fromm, Eckehard
    New search for: Hofmann, Siegfried

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Sputter deposition of nitride coatings in oxygen–contaminated sputter atmospheres

    New search for: Jehn, Hermann A.
    New search for: Fromm, Eckehard
    New search for: Hofmann, Siegfried

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Sputter deposition of nitride coatings in oxygen–contaminated sputter atmospheres

    Contributors:

    Jehn, Hermann A. (author) / Fromm, Eckehard (author) / Hofmann, Siegfried (author)

    Published in:

    International journal of material & product technology ; 8 ; 253-264

    Publication date:

    1993-01-01

    Size:

    12 pages

    ISSN:

    0268-1900

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Sputter deposition of nitride coatings in oxygen-contaminated sputter atmospheres

    Jehn, H. A. / Fromm, E. / Hofmann, S. | British Library Online Contents | 1993

    Niobium zirconium nitride sputter-deposited protective coatings

    Debessai, M. / Filip, P. / Aouadi, S. M. | British Library Online Contents | 2004

    Sputter Deposition of Fe-Co Nitride for Ferromagnetic Granular Nitride Thin Film

    Sakon, K. / Hirokawa, Y. / Masubuchi, Y. et al. | British Library Online Contents | 2010

    Reactive sputter deposition and characterization of tantalum nitride thin films

    Radhakrishnan, K. / Geok Ing, N. / Gopalakrishnan, R. | British Library Online Contents | 1999

    Amorphous molybdenum nitride thin films prepared by reactive sputter deposition

    Wang, Y. / Lin, R. Y. | British Library Online Contents | 2004

    Back to top