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A platform for research: civil engineering, architecture and urbanism
Predictive modeling of material removal rate in chemical mechanical planarization with physics-informed machine learning
Predictive modeling of material removal rate in chemical mechanical planarization with physics-informed machine learning
Predictive modeling of material removal rate in chemical mechanical planarization with physics-informed machine learning
Yu, Tianyu (author) / Li, Zhixiong (author) / Wu, Dazhong (author)
Wear = ; 426 ; 1430-1438
2019-01-01
9 pages
Article (Journal)
English
DDC:
621.89
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