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    Effect of additives for higher removal rate in lithium niobate chemical mechanical planarization

    New search for: Jeong, S.
    New search for: Lee, H.
    New search for: Cho, H.
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    New search for: Kim, H.
    New search for: Kim, S.
    New search for: Park, J.
    New search for: Jeong, H.

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    Effect of additives for higher removal rate in lithium niobate chemical mechanical planarization

    New search for: Jeong, S.
    New search for: Lee, H.
    New search for: Cho, H.
    New search for: Lee, S.
    New search for: Kim, H.
    New search for: Kim, S.
    New search for: Park, J.
    New search for: Jeong, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of additives for higher removal rate in lithium niobate chemical mechanical planarization

    New search for: Jeong, S.
    New search for: Lee, H.
    New search for: Cho, H.
    New search for: Lee, S.
    New search for: Kim, H.
    New search for: Kim, S.
    New search for: Park, J.
    New search for: Jeong, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Effect of additives for higher removal rate in lithium niobate chemical mechanical planarization

    Contributors:

    Jeong, S. (author) / Lee, H. (author) / Cho, H. (author) / Lee, S. (author) / Kim, H. (author) / Kim, S. (author) / Park, J. (author) / Jeong, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 256 ; 1683-1688

    Publication date:

    2010-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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