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Partially ionized beam deposition of silicon dioxide and aluminium thin films defects generation

Wong, Justin Wai Chow

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Partially ionized beam deposition of silicon dioxide and aluminium thin films defects generation

Wong, Justin Wai Chow

Partially ionized beam deposition of silicon dioxide and aluminium thin films defects generation

Wong, Justin Wai Chow

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Check availability in my library

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Document information

Similar titles

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Document information

Title:

Partially ionized beam deposition of silicon dioxide and aluminium thin films defects generation

Contributors:

Wong, Justin Wai Chow (author)

Publication date:

1988

Size:

Mfiche

Remarks:

Troy, Rensselaer Polytechnic Inst., Ph.D.Thesis 1987
Digital preservation by Technische Informationsbibliothek (TIB) / Leibniz-Informationszentrum Technik und Naturwissenschaften und Universitätsbibliothek

Type of media:

Book

Type of material:

Language:

Unknown

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