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Preparation method of water-based tape-casting high-thermal-conductivity aluminum nitride ceramic substrate
The invention discloses a preparation method of a water-based tape-casting high-thermal-conductivity aluminum nitride ceramic substrate. The preparation method comprises the following steps: (1) carrying out surface modification on aluminum nitride powder by adopting aluminum oxide and aluminum dihydrogen phosphate; (2) weighing and uniformly mixing the modified aluminum nitride powder, a dispersing agent, a plasticizer and a binder; (3) carrying out vacuum defoaming; (4) preparing a green body by adopting a tape casting and isostatic cool pressing combined process; (5) discharging the glue, and keeping the temperature at 180-460 DEG C for 2-3 hours; and (6) carrying out sintering for 4-6 hours at the temperature of 1600-1750 DEG C in a nitrogen atmosphere. The adopted solvent is water, the method is safe, green and environmentally friendly, the stability of the slurry is good, and the prepared ceramic substrate is high in heat conductivity; and the process is simple, the production cost is low, and the method can be applied to the fields of high-power density circuits, IGBTs and the like.
本发明公开了一种水基流延成型高导热氮化铝陶瓷基板的制备方法(1)采用氧化铝磷酸二氢铝对氮化铝粉体进行表面改性;(2)称取改性后的氮化铝粉体、分散剂、增塑剂、粘结剂并混合均匀;(3)真空除泡;(4)生坯的制备,采用流延成型与冷等静压成型相结合工艺;(5)排胶,在180℃~460℃下保温2~3h;(6)氮气气氛下1600℃~1750℃烧结4~6h。本发明采用的溶剂为水,安全、绿色、环保,浆料的稳定性好,制得的陶瓷基板热导率高;工艺简单,且生产成本较低,可用于高功率密度电路、IGBT等领域。
Preparation method of water-based tape-casting high-thermal-conductivity aluminum nitride ceramic substrate
The invention discloses a preparation method of a water-based tape-casting high-thermal-conductivity aluminum nitride ceramic substrate. The preparation method comprises the following steps: (1) carrying out surface modification on aluminum nitride powder by adopting aluminum oxide and aluminum dihydrogen phosphate; (2) weighing and uniformly mixing the modified aluminum nitride powder, a dispersing agent, a plasticizer and a binder; (3) carrying out vacuum defoaming; (4) preparing a green body by adopting a tape casting and isostatic cool pressing combined process; (5) discharging the glue, and keeping the temperature at 180-460 DEG C for 2-3 hours; and (6) carrying out sintering for 4-6 hours at the temperature of 1600-1750 DEG C in a nitrogen atmosphere. The adopted solvent is water, the method is safe, green and environmentally friendly, the stability of the slurry is good, and the prepared ceramic substrate is high in heat conductivity; and the process is simple, the production cost is low, and the method can be applied to the fields of high-power density circuits, IGBTs and the like.
本发明公开了一种水基流延成型高导热氮化铝陶瓷基板的制备方法(1)采用氧化铝磷酸二氢铝对氮化铝粉体进行表面改性;(2)称取改性后的氮化铝粉体、分散剂、增塑剂、粘结剂并混合均匀;(3)真空除泡;(4)生坯的制备,采用流延成型与冷等静压成型相结合工艺;(5)排胶,在180℃~460℃下保温2~3h;(6)氮气气氛下1600℃~1750℃烧结4~6h。本发明采用的溶剂为水,安全、绿色、环保,浆料的稳定性好,制得的陶瓷基板热导率高;工艺简单,且生产成本较低,可用于高功率密度电路、IGBT等领域。
Preparation method of water-based tape-casting high-thermal-conductivity aluminum nitride ceramic substrate
一种水基流延成型高导热氮化铝陶瓷基板的制备方法
LI CHUNHONG (author) / HUANG JIA (author) / KANG XIAOLI (author) / CUI XUDONG (author)
2020-12-29
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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