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A platform for research: civil engineering, architecture and urbanism
Graphite base and preparation method thereof
The invention provides a graphite base. The graphite base comprises a graphite base body, a graphene transition layer and a main phase coating, wherein the graphene transition layer and the main phase coating are sequentially attached to the surface of the graphite base body; the graphene transition layer contains graphene; and the main phase coating contains silicon carbide. Through the setting method, the problem that the bonding force of the SiC coating and the graphite matrix of the graphite-based product is poor can be solved, the coating of the product is prevented from falling off, and the service life of the graphite-based product is prolonged; the preparation method of the graphite base is short in process, low in cost and smaller in risk and investment, the graphite base cannot be damaged, the flatness of the silicon carbide coating cannot be affected, impurity elements cannot be introduced, the purity of the silicon carbide coating cannot be interfered, and the requirements of the semiconductor industry are met.
本发明提供了一种石墨基座，包括石墨基体和依次附着于所述石墨基体表面的石墨烯过渡层和主相涂层；所述石墨烯过渡层中含有石墨烯；所述主相涂层中含有碳化硅。通过这种设置方法，可以解决石墨基产品的SiC涂层和石墨基体结合力不良的问题，避免了产品发生涂层脱落，延长了石墨基产品的使用寿命；并且本发明提供的石墨基座的制备方法工序短、成本低，风险和投入更小，且不会破坏石墨基体本身，影响碳化硅涂层的平整度，更不会引入杂质元素，干扰到碳化硅涂层的纯度，满足半导体行业的需求。
Graphite base and preparation method thereof
The invention provides a graphite base. The graphite base comprises a graphite base body, a graphene transition layer and a main phase coating, wherein the graphene transition layer and the main phase coating are sequentially attached to the surface of the graphite base body; the graphene transition layer contains graphene; and the main phase coating contains silicon carbide. Through the setting method, the problem that the bonding force of the SiC coating and the graphite matrix of the graphite-based product is poor can be solved, the coating of the product is prevented from falling off, and the service life of the graphite-based product is prolonged; the preparation method of the graphite base is short in process, low in cost and smaller in risk and investment, the graphite base cannot be damaged, the flatness of the silicon carbide coating cannot be affected, impurity elements cannot be introduced, the purity of the silicon carbide coating cannot be interfered, and the requirements of the semiconductor industry are met.
本发明提供了一种石墨基座，包括石墨基体和依次附着于所述石墨基体表面的石墨烯过渡层和主相涂层；所述石墨烯过渡层中含有石墨烯；所述主相涂层中含有碳化硅。通过这种设置方法，可以解决石墨基产品的SiC涂层和石墨基体结合力不良的问题，避免了产品发生涂层脱落，延长了石墨基产品的使用寿命；并且本发明提供的石墨基座的制备方法工序短、成本低，风险和投入更小，且不会破坏石墨基体本身，影响碳化硅涂层的平整度，更不会引入杂质元素，干扰到碳化硅涂层的纯度，满足半导体行业的需求。
Graphite base and preparation method thereof
一种石墨基座及其制备方法
LIAO JIAHAO (author) / GENG MAOFU (author) / DOU KUNPENG (author) / CHAI PAN (author) / WAN QIANG (author)
2024-03-15
Patent
Electronic Resource
Chinese
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