A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
A ceramic sintered body (3) according to the present invention contains Zr, Al, Y and Mg; the content of Zr is from 7.5% by mass to 23.5% by mass (inclusive) in terms of ZrO2; the content of Al is from 74.9% by mass to 91.8% by mass (inclusive) in terms of Al2O3; the content of Y is from 0.41% by mass to 1.58% by mass (inclusive) in terms of Y2O3; and the content of Mg is from 0.10% by mass to 0.80% by mass (inclusive) in terms of MgO. The M-phase ratio after thermal aging of the ceramic sintered body (3) is 15% or less.
陶瓷烧结体(3)包含Zr、Al、Y和Mg，Zr的含量以ZrO2换算为7.5质量％以上且23.5质量％以下，Al的含量以Al2O3换算为74.9质量％以上且91.8质量％以下，Y的含量以Y2O3换算为0.41质量％以上且1.58质量％以下，Mg的含量以MgO换算为0.10质量％以上且0.80质量％以下。陶瓷烧结体(3)的热老化后M相率为15％以下。
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
A ceramic sintered body (3) according to the present invention contains Zr, Al, Y and Mg; the content of Zr is from 7.5% by mass to 23.5% by mass (inclusive) in terms of ZrO2; the content of Al is from 74.9% by mass to 91.8% by mass (inclusive) in terms of Al2O3; the content of Y is from 0.41% by mass to 1.58% by mass (inclusive) in terms of Y2O3; and the content of Mg is from 0.10% by mass to 0.80% by mass (inclusive) in terms of MgO. The M-phase ratio after thermal aging of the ceramic sintered body (3) is 15% or less.
陶瓷烧结体(3)包含Zr、Al、Y和Mg，Zr的含量以ZrO2换算为7.5质量％以上且23.5质量％以下，Al的含量以Al2O3换算为74.9质量％以上且91.8质量％以下，Y的含量以Y2O3换算为0.41质量％以上且1.58质量％以下，Mg的含量以MgO换算为0.10质量％以上且0.80质量％以下。陶瓷烧结体(3)的热老化后M相率为15％以下。
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
陶瓷烧结体以及半导体装置用基板
UMEDA YUJI (author) / KONO HIROSHI (author)
2021-05-11
Patent
Electronic Resource
Chinese
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