A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
A ceramic sintered body (3) according to the present invention contains Zr, Al, Y and Mg; the content of Zr is from 7.5% by mass to 23.5% by mass (inclusive) in terms of ZrO2; the content of Al is from 74.9% by mass to 91.8% by mass (inclusive) in terms of Al2O3; the content of Y is from 0.41% by mass to 1.58% by mass (inclusive) in terms of Y2O3; and the content of Mg is from 0.10% by mass to 0.80% by mass (inclusive) in terms of MgO. The M-phase ratio after thermal aging of the ceramic sintered body (3) is 15% or less.
Un corps fritté en céramique (3) selon la présente invention contient du Zr, de l'Al, du Y et du Mg ; la teneur en Zr varie de 7,5 % en masse à 23,5 % en masse (bornes incluses) en termes de ZrO2 ; la teneur en Al varie de 74,9 % en masse à 91,8 % en masse (bornes incluses) en termes d'Al2O3 ; la teneur en Y varie de 0,41 % en masse à 1,58 % en masse (bornes incluses) en termes de Y2O3 ; et la teneur en Mg varie de 0,10 % en masse à 0,80 % en masse (bornes inclus) en termes de MgO. La proportion de phase M après vieillissement thermique du corps fritté en céramique (3) est inférieure ou égale à 15 %.
セラミックス焼結体（３）は、Ｚｒと、Ａｌと、Ｙと、Ｍｇとを含み、Ｚｒの含有量は、ＺｒＯ２換算で７．５質量％以上２３．５質量％以下であり、Ａｌの含有量は、Ａｌ２Ｏ３換算で７４．９質量％以上９１．８質量％以下であり、Ｙの含有量は、Ｙ２Ｏ３換算で０．４１質量％以上１．５８質量％以下であり、Ｍｇの含有量は、ＭｇＯ換算で０．１０質量％以上０．８０質量％以下である。セラミックス焼結体（３）の熱エージング後Ｍ相率は、１５％以下である。
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
A ceramic sintered body (3) according to the present invention contains Zr, Al, Y and Mg; the content of Zr is from 7.5% by mass to 23.5% by mass (inclusive) in terms of ZrO2; the content of Al is from 74.9% by mass to 91.8% by mass (inclusive) in terms of Al2O3; the content of Y is from 0.41% by mass to 1.58% by mass (inclusive) in terms of Y2O3; and the content of Mg is from 0.10% by mass to 0.80% by mass (inclusive) in terms of MgO. The M-phase ratio after thermal aging of the ceramic sintered body (3) is 15% or less.
Un corps fritté en céramique (3) selon la présente invention contient du Zr, de l'Al, du Y et du Mg ; la teneur en Zr varie de 7,5 % en masse à 23,5 % en masse (bornes incluses) en termes de ZrO2 ; la teneur en Al varie de 74,9 % en masse à 91,8 % en masse (bornes incluses) en termes d'Al2O3 ; la teneur en Y varie de 0,41 % en masse à 1,58 % en masse (bornes incluses) en termes de Y2O3 ; et la teneur en Mg varie de 0,10 % en masse à 0,80 % en masse (bornes inclus) en termes de MgO. La proportion de phase M après vieillissement thermique du corps fritté en céramique (3) est inférieure ou égale à 15 %.
セラミックス焼結体（３）は、Ｚｒと、Ａｌと、Ｙと、Ｍｇとを含み、Ｚｒの含有量は、ＺｒＯ２換算で７．５質量％以上２３．５質量％以下であり、Ａｌの含有量は、Ａｌ２Ｏ３換算で７４．９質量％以上９１．８質量％以下であり、Ｙの含有量は、Ｙ２Ｏ３換算で０．４１質量％以上１．５８質量％以下であり、Ｍｇの含有量は、ＭｇＯ換算で０．１０質量％以上０．８０質量％以下である。セラミックス焼結体（３）の熱エージング後Ｍ相率は、１５％以下である。
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
CORPS FRITTÉ EN CÉRAMIQUE ET SUBSTRAT POUR DISPOSITIFS SEMICONDUCTEURS
セラミックス焼結体及び半導体装置用基板
UMEDA YUJI (author) / KOUNO HIROSHI (author)
2020-06-11
Patent
Electronic Resource
Japanese
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
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| European Patent Office | 2021
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICE
| European Patent Office | 2022
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICE
| European Patent Office | 2022