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CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
The ceramic sintered body contains Zr, Al, Y, and Mg. A Zr content is 7.5 mass % or more and 23.5 mass % or less in terms of ZrO2. An Al content is 74.9 mass % or more and 91.8 mass % or less in terms of Al2O3. A Y content is 0.41 mass % or more and 1.58 mass % or less in terms of Y2O3. A Mg content is 0.10 mass % or more and 0.80 mass % or less in terms of MgO. A ZrO2 crystal phase as a crystal phase has a monoclinic phase and a tetragonal phase as crystal structures. When a thermal aging treatment is performed for 100 hours in an environment of 180 degrees C., a ratio of a peak intensity of the monoclinic phase to a sum of peak intensities of the monoclinic phase and the tetragonal phase is 15% or less in the X-ray diffraction pattern.
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
The ceramic sintered body contains Zr, Al, Y, and Mg. A Zr content is 7.5 mass % or more and 23.5 mass % or less in terms of ZrO2. An Al content is 74.9 mass % or more and 91.8 mass % or less in terms of Al2O3. A Y content is 0.41 mass % or more and 1.58 mass % or less in terms of Y2O3. A Mg content is 0.10 mass % or more and 0.80 mass % or less in terms of MgO. A ZrO2 crystal phase as a crystal phase has a monoclinic phase and a tetragonal phase as crystal structures. When a thermal aging treatment is performed for 100 hours in an environment of 180 degrees C., a ratio of a peak intensity of the monoclinic phase to a sum of peak intensities of the monoclinic phase and the tetragonal phase is 15% or less in the X-ray diffraction pattern.
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
UMEDA YUJI (author) / KOUNO HIROSHI (author)
2021-08-12
Patent
Electronic Resource
English
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