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CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
The ceramic sintered body (3) contains Zr, Al, Y, and Mg, and the Zr content is 7.5 mass% or more and 23.5 mass% or less in terms of ZrO2, the Al content is 74.9 mass% or more and 91.8 mass% or less in terms of Al2O3, the Y content is 0.41 mass% or more and 1.58 mass% or less in terms of Y2O3, and the Mg content is 0.10 mass% or more and 0.80 mass% or less in terms of MgO. The M phase ratio of the ceramic sintered body (3) after thermal aging is 15% or less.
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
The ceramic sintered body (3) contains Zr, Al, Y, and Mg, and the Zr content is 7.5 mass% or more and 23.5 mass% or less in terms of ZrO2, the Al content is 74.9 mass% or more and 91.8 mass% or less in terms of Al2O3, the Y content is 0.41 mass% or more and 1.58 mass% or less in terms of Y2O3, and the Mg content is 0.10 mass% or more and 0.80 mass% or less in terms of MgO. The M phase ratio of the ceramic sintered body (3) after thermal aging is 15% or less.
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
KERAMISCHER SINTERKÖRPER UND SUBSTRAT FÜR HALBLEITERBAUELEMENTE
CORPS FRITTÉ EN CÉRAMIQUE ET SUBSTRAT POUR DISPOSITIFS SEMICONDUCTEURS
UMEDA YUJI (author) / KOUNO HIROSHI (author)
2022-05-11
Patent
Electronic Resource
English
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