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A platform for research: civil engineering, architecture and urbanism
Silicon carbide composite target material and preparation method thereof
The invention provides a silicon carbide composite target material and a preparation method thereof, and the preparation method comprises the following steps: mixing silicon carbide powder, carbon powder, a binder and a solvent, and carrying out wet ball milling to obtain mixed slurry; carrying out spray granulation on the mixed slurry to obtain granulated powder; performing cold isostatic pressing on the granulated powder to obtain a target material blank; and carrying out hot pressed sintering on the target blank to obtain the silicon carbide composite target. According to the method, a wet ball-milling process is selected according to the characteristics of the raw materials, and then spray granulation and cold isostatic pressing are performed to obtain a blank with uniformly mixed powder and high density, so that the problems of powder overflow and ejection in the hot pressing sintering process are avoided; a target product which is stable in quality and consistent in performance is obtained by controlling a hot pressing sintering process, and the performance requirement of subsequent sputtering use is met; and the method is easy to operate, good in continuity, low in cost and wide in application range.
本发明提供了一种碳化硅复合靶材及其制备方法，所述制备方法包括以下步骤：将碳化硅粉末、碳粉、粘结剂和溶剂混合进行湿法球磨，得到混合浆料；将混合浆料进行喷雾造粒，得到造粒粉末；将造粒粉末进行冷等静压成型，得到靶材坯料；将靶材坯料进行热压烧结，得到碳化硅复合靶材。本发明所述方法根据原料的特性选择湿法球磨工艺，再经喷雾造粒、冷等静压成型，得到粉末混合均匀、致密度高的坯料，避免热压烧结过程中出现粉末外溢和喷出的问题；再经对热压烧结工艺的控制，得到质量稳定，性能一致的靶材产品，满足后续溅射使用的性能要求；所述方法操作简单，连贯性好，成本较低，适用范围广。
Silicon carbide composite target material and preparation method thereof
The invention provides a silicon carbide composite target material and a preparation method thereof, and the preparation method comprises the following steps: mixing silicon carbide powder, carbon powder, a binder and a solvent, and carrying out wet ball milling to obtain mixed slurry; carrying out spray granulation on the mixed slurry to obtain granulated powder; performing cold isostatic pressing on the granulated powder to obtain a target material blank; and carrying out hot pressed sintering on the target blank to obtain the silicon carbide composite target. According to the method, a wet ball-milling process is selected according to the characteristics of the raw materials, and then spray granulation and cold isostatic pressing are performed to obtain a blank with uniformly mixed powder and high density, so that the problems of powder overflow and ejection in the hot pressing sintering process are avoided; a target product which is stable in quality and consistent in performance is obtained by controlling a hot pressing sintering process, and the performance requirement of subsequent sputtering use is met; and the method is easy to operate, good in continuity, low in cost and wide in application range.
本发明提供了一种碳化硅复合靶材及其制备方法，所述制备方法包括以下步骤：将碳化硅粉末、碳粉、粘结剂和溶剂混合进行湿法球磨，得到混合浆料；将混合浆料进行喷雾造粒，得到造粒粉末；将造粒粉末进行冷等静压成型，得到靶材坯料；将靶材坯料进行热压烧结，得到碳化硅复合靶材。本发明所述方法根据原料的特性选择湿法球磨工艺，再经喷雾造粒、冷等静压成型，得到粉末混合均匀、致密度高的坯料，避免热压烧结过程中出现粉末外溢和喷出的问题；再经对热压烧结工艺的控制，得到质量稳定，性能一致的靶材产品，满足后续溅射使用的性能要求；所述方法操作简单，连贯性好，成本较低，适用范围广。
Silicon carbide composite target material and preparation method thereof
一种碳化硅复合靶材及其制备方法
YAO LIJUN (author) / PAN JIE (author) / WANG JUBAO (author) / SHAN CHANGBIN (author) / WANG XUEZE (author) / WANG KE (author)
2021-05-18
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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