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Electrically conductive zinc-tin oxide target material and preparation method and application thereof
The invention relates to the field of target material preparation, and in particular, relates to an electrically conductive zinc-tin oxide target material and a preparation method and application thereof. The preparation method comprises the steps: pretreating 5-20 parts by mass of SnO powder, 80-95 parts by mass of SnO2 powder and auxiliary materials to obtain SnOx powder, mixing the SnOx powder and ZnO powder, granulating, processing, forming and sintering to obtain the electrically conductive zinc-tin oxide target material. SnO2 is a full-valence oxide and is non-electrically conductive, SnOx loses a part of oxygen, so that oxygen vacancy defects are caused, a P-type semiconductor is formed, and electric conduction can be realized; the value range of X in the SnOx powder can be controlled to be 1.80-1.95 by a certain proportion of dosage, so that the electrical conductivity of the target material is maintained in a reasonable range, and thus, when the target material is applied to a subsequent coating process, the coating efficiency is ensured, the coating cost can be effectively controlled, a large amount of oxygen does not need to be filled in the coating process, the coating effect is better, and the service life is longer.
本发明靶材制备领域，特别是涉及一种导电锌‑锡氧化物靶材及其制备方法与应用。本发明通过将5～20质量份的SnO粉体、80～95质量份的SnO2粉体和辅料进行预处理得到SnOx粉体，再将SnOx粉体与ZnO粉体混合造粒、加工成型、烧结，即可得到导电的锌‑锡氧化物靶材。SnO2是满价氧化物不导电，SnOx中由于失去一部分氧，造成氧空位缺陷，形成了P型半导体从而能实现导电；一定比例的用量可以将SnOx粉体中X的取值范围控制在1.80～1.95，从而将靶材电导率维持在合理范围内，因此，在将靶材运用在后续镀膜工序中时，既保证了镀膜效率，又能有效地控制镀膜成本，无需在镀膜工序中大量填充氧气，镀膜效果更好，且使用寿命更长。
Electrically conductive zinc-tin oxide target material and preparation method and application thereof
The invention relates to the field of target material preparation, and in particular, relates to an electrically conductive zinc-tin oxide target material and a preparation method and application thereof. The preparation method comprises the steps: pretreating 5-20 parts by mass of SnO powder, 80-95 parts by mass of SnO2 powder and auxiliary materials to obtain SnOx powder, mixing the SnOx powder and ZnO powder, granulating, processing, forming and sintering to obtain the electrically conductive zinc-tin oxide target material. SnO2 is a full-valence oxide and is non-electrically conductive, SnOx loses a part of oxygen, so that oxygen vacancy defects are caused, a P-type semiconductor is formed, and electric conduction can be realized; the value range of X in the SnOx powder can be controlled to be 1.80-1.95 by a certain proportion of dosage, so that the electrical conductivity of the target material is maintained in a reasonable range, and thus, when the target material is applied to a subsequent coating process, the coating efficiency is ensured, the coating cost can be effectively controlled, a large amount of oxygen does not need to be filled in the coating process, the coating effect is better, and the service life is longer.
本发明靶材制备领域，特别是涉及一种导电锌‑锡氧化物靶材及其制备方法与应用。本发明通过将5～20质量份的SnO粉体、80～95质量份的SnO2粉体和辅料进行预处理得到SnOx粉体，再将SnOx粉体与ZnO粉体混合造粒、加工成型、烧结，即可得到导电的锌‑锡氧化物靶材。SnO2是满价氧化物不导电，SnOx中由于失去一部分氧，造成氧空位缺陷，形成了P型半导体从而能实现导电；一定比例的用量可以将SnOx粉体中X的取值范围控制在1.80～1.95，从而将靶材电导率维持在合理范围内，因此，在将靶材运用在后续镀膜工序中时，既保证了镀膜效率，又能有效地控制镀膜成本，无需在镀膜工序中大量填充氧气，镀膜效果更好，且使用寿命更长。
Electrically conductive zinc-tin oxide target material and preparation method and application thereof
导电锌-锡氧化物靶材及其制备方法与应用
ZHANG YULING (author) / GAN ZHIJIAN (author)
2021-07-09
Patent
Electronic Resource
Chinese
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