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Sintered body, target material and preparation method thereof
The invention discloses a sintered body and a target material. The sintered body and the target material consist of an ITO base material and a high-melting-point oxide solid solution distributed in the ITO base material, the invention also provides a preparation method of the sintered body and the target material, and the preparation method comprises a sintering process, the sintering process comprises the following steps: co-sintering the ITO mixed powder containing the oxide solid solution or the oxide solid solution corresponding to the hydroxide, preparing the sintered body after co-sintering, and carrying out plastic processing on the sintered body to form the ITO target material. According to the sintered body, the target material and the sintered body and the target material prepared by the preparation method, the phenomenon of cracks of the sintered body and the target material can be effectively inhibited.
本发明公开了一种烧结体及靶材，其组成包括该烧结体及靶材由ITO基材及分布在该ITO基材内的高熔点氧化物固溶体组成；本发明同时还提供了该烧结体及靶材的制备方法，包括烧制工序，该烧制工序是将含有氧化物固溶体或氧化物固溶体对应氢氧化物的ITO混合粉体进行共烧，共烧后制备得到烧结体，对烧结体进行塑性加工，形成ITO靶材。本发明所提供的烧结体、靶材以及通过本发明制备方法制备的烧结体及靶材能够有效抑制烧结体及靶材发生裂纹的现象。
Sintered body, target material and preparation method thereof
The invention discloses a sintered body and a target material. The sintered body and the target material consist of an ITO base material and a high-melting-point oxide solid solution distributed in the ITO base material, the invention also provides a preparation method of the sintered body and the target material, and the preparation method comprises a sintering process, the sintering process comprises the following steps: co-sintering the ITO mixed powder containing the oxide solid solution or the oxide solid solution corresponding to the hydroxide, preparing the sintered body after co-sintering, and carrying out plastic processing on the sintered body to form the ITO target material. According to the sintered body, the target material and the sintered body and the target material prepared by the preparation method, the phenomenon of cracks of the sintered body and the target material can be effectively inhibited.
本发明公开了一种烧结体及靶材，其组成包括该烧结体及靶材由ITO基材及分布在该ITO基材内的高熔点氧化物固溶体组成；本发明同时还提供了该烧结体及靶材的制备方法，包括烧制工序，该烧制工序是将含有氧化物固溶体或氧化物固溶体对应氢氧化物的ITO混合粉体进行共烧，共烧后制备得到烧结体，对烧结体进行塑性加工，形成ITO靶材。本发明所提供的烧结体、靶材以及通过本发明制备方法制备的烧结体及靶材能够有效抑制烧结体及靶材发生裂纹的现象。
Sintered body, target material and preparation method thereof
一种烧结体、靶材及其制备方法
YIN BINGWEI (author) / XIAO JUNFENG (author) / SUN JUN (author) / ZHOU HUAMING (author) / LI YAN (author) / SHI GANG (author)
2021-07-23
Patent
Electronic Resource
Chinese
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