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The invention provides a preparation method and application of an aluminum-doped zinc oxide target material, and the preparation method of the aluminum-doped zinc oxide target material comprises the following steps: (1) carrying out cold isostatic pressing molding on aluminum-doped zinc oxide nano powder to obtain a biscuit; and (2) embedding the biscuit into heat-conducting sand, and sintering at the temperature of 1520-1550 DEG C to obtain the aluminum-doped zinc oxide target material. The preparation method has the advantages that the target material obtained through the preparation method can be made into the zinc aluminum oxide doped piezoelectric film with the uniform surface and the thickness ranging from 400 nm to 1000 nm, the obtained piezoelectric film can form a consistent piezoelectric coating film on the surface of a wafer with the diameter larger than 8 inches, and cracking and demolding are avoided.
本发明提供一种铝掺杂氧化锌靶材的制备方法及应用，所述铝掺杂氧化锌靶材的制备方法包括以下步骤：(1)将铝掺杂的氧化锌纳米粉体采用冷等静压压制成型，得到素坯；(2)将素坯埋入导热砂中在1520‑1550℃的温度下烧结，得到铝掺杂氧化锌靶材。本发明的有益效果为：本发明所述制备方法得到的靶材可以制成表面均匀、厚度在400nm‑1000nm的氧化锌铝掺杂压电膜，所得压电膜可以在直径8英寸以上晶圆表面形成一致性的压电镀膜，且不会开裂、脱模。
The invention provides a preparation method and application of an aluminum-doped zinc oxide target material, and the preparation method of the aluminum-doped zinc oxide target material comprises the following steps: (1) carrying out cold isostatic pressing molding on aluminum-doped zinc oxide nano powder to obtain a biscuit; and (2) embedding the biscuit into heat-conducting sand, and sintering at the temperature of 1520-1550 DEG C to obtain the aluminum-doped zinc oxide target material. The preparation method has the advantages that the target material obtained through the preparation method can be made into the zinc aluminum oxide doped piezoelectric film with the uniform surface and the thickness ranging from 400 nm to 1000 nm, the obtained piezoelectric film can form a consistent piezoelectric coating film on the surface of a wafer with the diameter larger than 8 inches, and cracking and demolding are avoided.
本发明提供一种铝掺杂氧化锌靶材的制备方法及应用，所述铝掺杂氧化锌靶材的制备方法包括以下步骤：(1)将铝掺杂的氧化锌纳米粉体采用冷等静压压制成型，得到素坯；(2)将素坯埋入导热砂中在1520‑1550℃的温度下烧结，得到铝掺杂氧化锌靶材。本发明的有益效果为：本发明所述制备方法得到的靶材可以制成表面均匀、厚度在400nm‑1000nm的氧化锌铝掺杂压电膜，所得压电膜可以在直径8英寸以上晶圆表面形成一致性的压电镀膜，且不会开裂、脱模。
Preparation method and application of aluminum-doped zinc oxide target material
一种铝掺杂氧化锌靶材的制备方法及应用
CHENG LIN (author)
2024-11-08
Patent
Electronic Resource
Chinese
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