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The invention discloses a preparation method of a zinc aluminum oxide target material, and belongs to the technical field of zinc oxide target materials, the zinc aluminum oxide target material is prepared by adopting a spray drying sintering process, static pressure forming and sintering, and the preparation method has the advantages of low energy consumption, high efficiency, economical equipment, good product performance and the like. The zinc aluminum oxide target can bear higher power, does not crack after being sputtered for a long time, can greatly improve the sputtering efficiency, has the resistivity of 0.8 * 10 <-2 > omega.cm < 3 >, is high in density and bonding strength, avoids cracking to a great extent, has higher strength and good thermal shock resistance, and is a high-density and low-resistivity zinc aluminum oxide target.
本发明公开了一种氧化锌铝靶材的制备方法，本发明属于氧化锌靶材技术领域，本发明公开的氧化锌铝靶材的制备方法，采用喷雾干燥烧结工艺、静压成形、烧结，制备了氧化锌铝靶材，具有能耗低、效率高、设备经济、产品性能好等优点，可以承受更高功率、长时间溅射而不开裂，可以大幅提高溅射效率，并且氧化锌铝靶材电阻率0.8×10‑2Ω·cm3，致密度高，结合强度高，很大程度上避免开裂，具有较高的强度,抗热冲击性能好，是一种高密度低电阻率的氧化锌铝靶材。
The invention discloses a preparation method of a zinc aluminum oxide target material, and belongs to the technical field of zinc oxide target materials, the zinc aluminum oxide target material is prepared by adopting a spray drying sintering process, static pressure forming and sintering, and the preparation method has the advantages of low energy consumption, high efficiency, economical equipment, good product performance and the like. The zinc aluminum oxide target can bear higher power, does not crack after being sputtered for a long time, can greatly improve the sputtering efficiency, has the resistivity of 0.8 * 10 <-2 > omega.cm < 3 >, is high in density and bonding strength, avoids cracking to a great extent, has higher strength and good thermal shock resistance, and is a high-density and low-resistivity zinc aluminum oxide target.
本发明公开了一种氧化锌铝靶材的制备方法，本发明属于氧化锌靶材技术领域，本发明公开的氧化锌铝靶材的制备方法，采用喷雾干燥烧结工艺、静压成形、烧结，制备了氧化锌铝靶材，具有能耗低、效率高、设备经济、产品性能好等优点，可以承受更高功率、长时间溅射而不开裂，可以大幅提高溅射效率，并且氧化锌铝靶材电阻率0.8×10‑2Ω·cm3，致密度高，结合强度高，很大程度上避免开裂，具有较高的强度,抗热冲击性能好，是一种高密度低电阻率的氧化锌铝靶材。
Preparation method of aluminum zinc oxide target material
一种氧化锌铝靶材的制备方法
LIU YI (author)
2024-03-26
Patent
Electronic Resource
Chinese
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