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Preparation method of zinc oxide aluminum alloy target material
The invention provides a preparation method of a zinc oxide-aluminum alloy target material, which comprises the following steps: A) mixing zinc oxide and aluminum oxide in a vacuum rolling mixer to obtain a mixture; b) performing cold isostatic pressing on the mixture after vacuumizing to obtain a rough blank, and performing secondary pressing on the rough blank to obtain an alloy target material green body; c) performing vacuum hot pressed sintering on the alloy target material green body to obtain a zinc oxide aluminum alloy target material crude product; and D) annealing the zinc oxide-aluminum alloy target material crude product, and spraying the mixture obtained in the step A) onto the surface of the annealed zinc oxide-aluminum alloy target material crude product through plasma spraying to obtain the zinc oxide-aluminum alloy target material. The zinc oxide aluminum alloy target material which is uniform in structure, fine in grain and high in thermal shock resistance is prepared, the alloy target material is used as a rotating target for vacuum coating, a high-quality thin film which is high in resistance, resistant to electromagnetic interference, antistatic and resistant to abrasion can be obtained, the uniformity of a film layer can be improved, and the utilization rate of the target material is increased.
本发明提供了一种氧化锌铝合金靶材的制备方法，包括以下步骤：A)将氧化锌和氧化铝置于真空滚动混料机中混合，得到混合物；B)将所述混合物抽真空后冷等静压，得到粗坯，将所述粗坯进行二次压制，得到合金靶材生坯；C)将合金靶材生坯进行真空热压烧结，得到氧化锌铝合金靶材粗品；D)将所述氧化锌铝合金靶材粗品进行退火，将步骤A)的混合物等离子喷涂至退火后的氧化锌铝合金靶材粗品表面，得到氧化锌铝合金靶材。本申请制备了具有组织均匀晶粒细小、高耐热冲击性能的氧化锌铝合金靶材，该种合金靶材作为旋转靶真空镀膜，可得到高电阻、抗电磁干扰、防静电、抗磨损的优质薄膜，可增加膜层的均匀性，提高靶材的利用率。
Preparation method of zinc oxide aluminum alloy target material
The invention provides a preparation method of a zinc oxide-aluminum alloy target material, which comprises the following steps: A) mixing zinc oxide and aluminum oxide in a vacuum rolling mixer to obtain a mixture; b) performing cold isostatic pressing on the mixture after vacuumizing to obtain a rough blank, and performing secondary pressing on the rough blank to obtain an alloy target material green body; c) performing vacuum hot pressed sintering on the alloy target material green body to obtain a zinc oxide aluminum alloy target material crude product; and D) annealing the zinc oxide-aluminum alloy target material crude product, and spraying the mixture obtained in the step A) onto the surface of the annealed zinc oxide-aluminum alloy target material crude product through plasma spraying to obtain the zinc oxide-aluminum alloy target material. The zinc oxide aluminum alloy target material which is uniform in structure, fine in grain and high in thermal shock resistance is prepared, the alloy target material is used as a rotating target for vacuum coating, a high-quality thin film which is high in resistance, resistant to electromagnetic interference, antistatic and resistant to abrasion can be obtained, the uniformity of a film layer can be improved, and the utilization rate of the target material is increased.
本发明提供了一种氧化锌铝合金靶材的制备方法，包括以下步骤：A)将氧化锌和氧化铝置于真空滚动混料机中混合，得到混合物；B)将所述混合物抽真空后冷等静压，得到粗坯，将所述粗坯进行二次压制，得到合金靶材生坯；C)将合金靶材生坯进行真空热压烧结，得到氧化锌铝合金靶材粗品；D)将所述氧化锌铝合金靶材粗品进行退火，将步骤A)的混合物等离子喷涂至退火后的氧化锌铝合金靶材粗品表面，得到氧化锌铝合金靶材。本申请制备了具有组织均匀晶粒细小、高耐热冲击性能的氧化锌铝合金靶材，该种合金靶材作为旋转靶真空镀膜，可得到高电阻、抗电磁干扰、防静电、抗磨损的优质薄膜，可增加膜层的均匀性，提高靶材的利用率。
Preparation method of zinc oxide aluminum alloy target material
一种氧化锌铝合金靶材的制备方法
HUANG YONGXIANG (author)
2022-05-06
Patent
Electronic Resource
Chinese
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