A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Graphite plate as well as preparation method and application thereof
The invention discloses a graphite plate as well as a preparation method and application thereof, relates to the field of low-pressure MOCVD (Metal Organic Chemical Vapor Deposition) epitaxial growth, and in particular relates to a novel method for reducing pre-reaction. A layer of modified film is arranged on the surface layer of the graphite plate, and the thermal radiation coefficient of the modified film is lower than 0.2 W/(kg.K). According to the invention, the graphite plate is modified, so that the gas temperature of the area where the pre-reaction area is located is reduced, and the effect of retarding the pre-reaction is achieved.
本发明公开了一种石墨盘及其制备方法和应用，涉及低压MOCVD(石墨盘)外延生长领域，尤其涉及一种减少预反应的新方法。本发明所述石墨盘的表层有一层改性薄膜，所述改性薄膜热辐射系数低于0.2W/(kg·K)。本发明通过对石墨盘进行改性，降低了预反应区所在区域的气体温度，从而达到减缓预反应发生的效果。
Graphite plate as well as preparation method and application thereof
The invention discloses a graphite plate as well as a preparation method and application thereof, relates to the field of low-pressure MOCVD (Metal Organic Chemical Vapor Deposition) epitaxial growth, and in particular relates to a novel method for reducing pre-reaction. A layer of modified film is arranged on the surface layer of the graphite plate, and the thermal radiation coefficient of the modified film is lower than 0.2 W/(kg.K). According to the invention, the graphite plate is modified, so that the gas temperature of the area where the pre-reaction area is located is reduced, and the effect of retarding the pre-reaction is achieved.
本发明公开了一种石墨盘及其制备方法和应用，涉及低压MOCVD(石墨盘)外延生长领域，尤其涉及一种减少预反应的新方法。本发明所述石墨盘的表层有一层改性薄膜，所述改性薄膜热辐射系数低于0.2W/(kg·K)。本发明通过对石墨盘进行改性，降低了预反应区所在区域的气体温度，从而达到减缓预反应发生的效果。
Graphite plate as well as preparation method and application thereof
一种石墨盘及其制备方法和应用
LIU HENGCHANG (author) / WANG SHUO (author) / GAO XILONG (author) / LIU XUEZHEN (author) / HUANG SHANSHAN (author) / HUANG HUILIAN (author) / ZHOU WEIXIU (author)
2021-08-20
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
Surface modified graphite polar plate as well as preparation method and application thereof
| European Patent Office | 2023
Artificial graphite as well as preparation method and application thereof
| European Patent Office | 2024
Graphite felt preform as well as preparation method and application thereof
| European Patent Office | 2024
Improved graphite crucible as well as preparation method and application thereof
| European Patent Office | 2023