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Composite zirconium oxide powder, aluminum nitride ceramic substrate, preparation methods thereof, and application
The invention relates to composite zirconium oxide powder, an aluminum nitride ceramic substrate, preparation methods thereof and application. The composite zirconium oxide powder comprises an inner core and a shell layer wrapping the inner core, the inner core is nano zirconium oxide, and the shell layer is a mixture of aluminum oxide and aluminum nitride. The surface of nano zirconium oxide is coated with the aluminum oxide/aluminum nitride shell layer, so that the situation that when zirconium oxide powder serving as a toughening agent is added into aluminum nitride ceramic, zirconium oxide reacts to generate impurities, the content is reduced, and the expected toughening effect cannot be achieved is avoided, and therefore the toughening effect of zirconium oxide can be guaranteed; meanwhile, the surface of zirconium oxide is coated with the aluminum oxide/aluminum nitride shell layer structure, and zirconium oxide particles are not easy to agglomerate, so that the performance uniformity of ceramic products can be ensured. The aluminum nitride ceramic substrate obtained by adopting the composite zirconium oxide powder as a toughening agent has excellent mechanical properties under the condition of ensuring that the thermal conductivity meets the use requirements of a semiconductor packaging substrate.
本发明涉及一种复合氧化锆粉体、氮化铝陶瓷基板及其制备方法与应用。该复合氧化锆粉体包括内核及包裹于内核的壳层，内核为纳米氧化锆，壳层为氧化铝及氮化铝的混合物。通过在纳米氧化锆表面包覆氧化铝/氮化铝壳层，避免氧化锆粉体作为增韧剂加入氮化铝陶瓷时，氧化锆反应生成杂质而导致含量减少，达不到预期的增韧效果，因此能够保证氧化锆的增韧效果，同时由于氧化锆表面包覆氧化铝/氮化铝壳层结构，氧化锆颗粒不易发生团聚，因而能够保证陶瓷制品性能均一性。采用上述复合氧化锆粉体作为增韧剂得到的氮化铝陶瓷基板在保证热导率满足半导体封装基板使用要求的情况下，具有优良的力学性能。
Composite zirconium oxide powder, aluminum nitride ceramic substrate, preparation methods thereof, and application
The invention relates to composite zirconium oxide powder, an aluminum nitride ceramic substrate, preparation methods thereof and application. The composite zirconium oxide powder comprises an inner core and a shell layer wrapping the inner core, the inner core is nano zirconium oxide, and the shell layer is a mixture of aluminum oxide and aluminum nitride. The surface of nano zirconium oxide is coated with the aluminum oxide/aluminum nitride shell layer, so that the situation that when zirconium oxide powder serving as a toughening agent is added into aluminum nitride ceramic, zirconium oxide reacts to generate impurities, the content is reduced, and the expected toughening effect cannot be achieved is avoided, and therefore the toughening effect of zirconium oxide can be guaranteed; meanwhile, the surface of zirconium oxide is coated with the aluminum oxide/aluminum nitride shell layer structure, and zirconium oxide particles are not easy to agglomerate, so that the performance uniformity of ceramic products can be ensured. The aluminum nitride ceramic substrate obtained by adopting the composite zirconium oxide powder as a toughening agent has excellent mechanical properties under the condition of ensuring that the thermal conductivity meets the use requirements of a semiconductor packaging substrate.
本发明涉及一种复合氧化锆粉体、氮化铝陶瓷基板及其制备方法与应用。该复合氧化锆粉体包括内核及包裹于内核的壳层，内核为纳米氧化锆，壳层为氧化铝及氮化铝的混合物。通过在纳米氧化锆表面包覆氧化铝/氮化铝壳层，避免氧化锆粉体作为增韧剂加入氮化铝陶瓷时，氧化锆反应生成杂质而导致含量减少，达不到预期的增韧效果，因此能够保证氧化锆的增韧效果，同时由于氧化锆表面包覆氧化铝/氮化铝壳层结构，氧化锆颗粒不易发生团聚，因而能够保证陶瓷制品性能均一性。采用上述复合氧化锆粉体作为增韧剂得到的氮化铝陶瓷基板在保证热导率满足半导体封装基板使用要求的情况下，具有优良的力学性能。
Composite zirconium oxide powder, aluminum nitride ceramic substrate, preparation methods thereof, and application
复合氧化锆粉体、氮化铝陶瓷基板及其制备方法与应用
YANG XUEJIAO (author) / FU RAN (author) / TAN YICHENG (author)
2021-11-26
Patent
Electronic Resource
Chinese
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