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Preparation method of zirconium oxide-doped aluminum nitride ceramic substrate
According to the preparation method of the zirconium oxide-doped aluminum nitride ceramic substrate provided by the invention, the zirconium oxide powder is added into the aluminum nitride ceramic powder, and the high-toughness aluminum nitride ceramic is prepared through a series of working procedures of premixing, ball milling, defoaming and the like, so that the bending strength of the aluminum nitride ceramic substrate can be obviously improved; the generation of cracks of the aluminum nitride substrate in actual use is reduced, and the use reliability of the product is improved.
本发明提供了掺杂氧化锆的氮化铝陶瓷基板的制备方法，将氧化锆粉末加入氮化铝陶瓷粉末中，经预混、球磨、脱泡等一系列工序，制成高韧性的氮化铝陶瓷，从而可以明显提高氮化铝基板的抗弯强度，减少了氮化铝基板在实际使用中裂缝的产生，提高产品使用可靠性。
Preparation method of zirconium oxide-doped aluminum nitride ceramic substrate
According to the preparation method of the zirconium oxide-doped aluminum nitride ceramic substrate provided by the invention, the zirconium oxide powder is added into the aluminum nitride ceramic powder, and the high-toughness aluminum nitride ceramic is prepared through a series of working procedures of premixing, ball milling, defoaming and the like, so that the bending strength of the aluminum nitride ceramic substrate can be obviously improved; the generation of cracks of the aluminum nitride substrate in actual use is reduced, and the use reliability of the product is improved.
本发明提供了掺杂氧化锆的氮化铝陶瓷基板的制备方法，将氧化锆粉末加入氮化铝陶瓷粉末中，经预混、球磨、脱泡等一系列工序，制成高韧性的氮化铝陶瓷，从而可以明显提高氮化铝基板的抗弯强度，减少了氮化铝基板在实际使用中裂缝的产生，提高产品使用可靠性。
Preparation method of zirconium oxide-doped aluminum nitride ceramic substrate
一种掺杂氧化锆的氮化铝陶瓷基板的制备方法
ZHU LIN (author) / YANG QIANGJUN (author) / DAI HONGXING (author)
2024-12-27
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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Aluminum nitride ceramic substrate and preparation method thereof
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