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Oxide rotating target material and preparation method thereof
The invention discloses an oxide rotating target material and a preparation method thereof. The preparation method comprises the following steps: (1) mixing praseodymium oxide powder, gallium oxide powder, zinc oxide powder and indium oxide powder, adding a dispersing agent, a binding agent, water and a defoaming agent, and carrying out ball milling to obtain mixed slurry; (2) carrying out spray granulation on the mixed slurry to obtain powder for the oxide rotating target material; (3) guiding the powder for the oxide rotating target material into a mold, and performing cold isostatic pressing forming to obtain a target material green body; and (4) carrying out degreasing heat treatment on the target material green body, cooling to normal temperature, then carrying out sintering treatment, and naturally cooling to obtain the oxide rotating target material. On one hand, praseodymium oxide is doped with indium gallium zinc oxide, so that the carrier mobility of the target material is improved, and the resistivity of the target material is reduced; and on the other hand, the tubular oxide rotating target material is prepared through the method, the sputtered oxide film is better in uniformity and stability, recycling is more economical, and the carrier mobility of the film is high.
本发明公开了一种氧化物旋转靶材及其制备方法。所述制备方法包括如下步骤：(1)将氧化镨粉末、氧化镓粉末、氧化锌粉末和氧化铟粉末混合，加入分散剂、粘结剂、水和消泡剂球磨得到混合浆料；(2)将混合浆料进行喷雾造粒，得到氧化物转靶材用粉体；(3)将氧化物转靶材用粉体导入模具进行冷等静压成型，得到靶材坯体；(4)将靶材坯体进行脱脂热处理，冷却至常温后进行烧结处理，自然冷却后得到所述氧化物旋转靶材。本发明一方面将氧化镨掺杂铟嫁锌氧化物，提高靶材的载流子迁移率，降低靶材的电阻率。另一方面，通过本发明所述方法制备为管状氧化物旋转靶材，溅射的氧化物薄膜均匀性、稳定性更好，回收利用更经济，薄膜载流子迁移率高。
Oxide rotating target material and preparation method thereof
The invention discloses an oxide rotating target material and a preparation method thereof. The preparation method comprises the following steps: (1) mixing praseodymium oxide powder, gallium oxide powder, zinc oxide powder and indium oxide powder, adding a dispersing agent, a binding agent, water and a defoaming agent, and carrying out ball milling to obtain mixed slurry; (2) carrying out spray granulation on the mixed slurry to obtain powder for the oxide rotating target material; (3) guiding the powder for the oxide rotating target material into a mold, and performing cold isostatic pressing forming to obtain a target material green body; and (4) carrying out degreasing heat treatment on the target material green body, cooling to normal temperature, then carrying out sintering treatment, and naturally cooling to obtain the oxide rotating target material. On one hand, praseodymium oxide is doped with indium gallium zinc oxide, so that the carrier mobility of the target material is improved, and the resistivity of the target material is reduced; and on the other hand, the tubular oxide rotating target material is prepared through the method, the sputtered oxide film is better in uniformity and stability, recycling is more economical, and the carrier mobility of the film is high.
本发明公开了一种氧化物旋转靶材及其制备方法。所述制备方法包括如下步骤：(1)将氧化镨粉末、氧化镓粉末、氧化锌粉末和氧化铟粉末混合，加入分散剂、粘结剂、水和消泡剂球磨得到混合浆料；(2)将混合浆料进行喷雾造粒，得到氧化物转靶材用粉体；(3)将氧化物转靶材用粉体导入模具进行冷等静压成型，得到靶材坯体；(4)将靶材坯体进行脱脂热处理，冷却至常温后进行烧结处理，自然冷却后得到所述氧化物旋转靶材。本发明一方面将氧化镨掺杂铟嫁锌氧化物，提高靶材的载流子迁移率，降低靶材的电阻率。另一方面，通过本发明所述方法制备为管状氧化物旋转靶材，溅射的氧化物薄膜均匀性、稳定性更好，回收利用更经济，薄膜载流子迁移率高。
Oxide rotating target material and preparation method thereof
一种氧化物旋转靶材及其制备方法
ZHANG LAIWEN (author) / SHAO XUELIANG (author) / LI KAIJIE (author) / ZHU LIU (author)
2021-12-24
Patent
Electronic Resource
Chinese
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