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Oxide target material and preparation method thereof
The invention belongs to the technical field of target materials, and discloses an oxide target material which comprises the following components in percentage by weight: 25-30% of zinc oxide, 25-30% of titanium oxide, 5-12.5% of aluminum oxide and the balance of indium tin oxide. Adding zinc oxide, titanium oxide and aluminum oxide powder into pure water, and dispersing to obtain slurry I; emulsifying the slurry I, and then performing ball milling to obtain slurry II; adding indium tin oxide powder into water, and dispersing to obtain slurry III; emulsifying the slurry III, mixing the emulsified slurry III with the slurry II and a binder, and carrying out ball milling to obtain a ball-milled material; spray-drying the ball-milled material, and then granulating to obtain pellets; and the pellets are sintered after being formed, and the oxide target material is obtained. The ITO target material provided by the invention is relatively low in resistivity, and the preparation method is simple to operate and low in cost.
本发明属于靶材技术领域，公开了一种氧化物靶材，其中，氧化锌的含量为25~30wt%，氧化钛的含量为25~30wt%，氧化铝的含量为5~12.5wt%，余量为氧化铟锡。将氧化锌、氧化钛、氧化铝粉末加入到纯水中，分散，得到浆料Ⅰ；将浆料Ⅰ进行乳化，然后球磨，得到浆料Ⅱ；将氧化铟锡粉末加入水中，分散，得到浆料Ⅲ；乳化浆料Ⅲ，然后与浆料Ⅱ、粘结剂混合，球磨，得到球磨料；喷雾干燥球磨料，然后造粒，得到球团；球团经成型后，烧结，即得到氧化物靶材。本发明提供的ITO靶材的电阻率较低，且制备方法操作简单，成本低。
Oxide target material and preparation method thereof
The invention belongs to the technical field of target materials, and discloses an oxide target material which comprises the following components in percentage by weight: 25-30% of zinc oxide, 25-30% of titanium oxide, 5-12.5% of aluminum oxide and the balance of indium tin oxide. Adding zinc oxide, titanium oxide and aluminum oxide powder into pure water, and dispersing to obtain slurry I; emulsifying the slurry I, and then performing ball milling to obtain slurry II; adding indium tin oxide powder into water, and dispersing to obtain slurry III; emulsifying the slurry III, mixing the emulsified slurry III with the slurry II and a binder, and carrying out ball milling to obtain a ball-milled material; spray-drying the ball-milled material, and then granulating to obtain pellets; and the pellets are sintered after being formed, and the oxide target material is obtained. The ITO target material provided by the invention is relatively low in resistivity, and the preparation method is simple to operate and low in cost.
本发明属于靶材技术领域，公开了一种氧化物靶材，其中，氧化锌的含量为25~30wt%，氧化钛的含量为25~30wt%，氧化铝的含量为5~12.5wt%，余量为氧化铟锡。将氧化锌、氧化钛、氧化铝粉末加入到纯水中，分散，得到浆料Ⅰ；将浆料Ⅰ进行乳化，然后球磨，得到浆料Ⅱ；将氧化铟锡粉末加入水中，分散，得到浆料Ⅲ；乳化浆料Ⅲ，然后与浆料Ⅱ、粘结剂混合，球磨，得到球磨料；喷雾干燥球磨料，然后造粒，得到球团；球团经成型后，烧结，即得到氧化物靶材。本发明提供的ITO靶材的电阻率较低，且制备方法操作简单，成本低。
Oxide target material and preparation method thereof
氧化物靶材及其制备方法
ZHANG LILAN (author) / GAO JIANCHENG (author) / XU TAO (author) / WANG QIANG (author) / YU FANG (author)
2023-12-29
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
Zinc oxide target material and preparation method thereof
| European Patent Office | 2023
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