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A platform for research: civil engineering, architecture and urbanism
ITO waste target recycling method
The invention provides an ITO waste target recycling method, which comprises the following steps: sequentially carrying out pretreatment, vacuum impurity removal treatment and crushing treatment on an ITO waste target to obtain ITO particles; carrying out oxygen pressure sintering on the ITO particles to obtain ITO powder; and after the ITO powder is subjected to die filling, sheath welding and degassing treatment in sequence, and performing hot isostatic pressing treatment to obtain the ITO target material. According to the recycling and reusing method, mold pressing and cold isostatic pressing treatment are not needed, the period of recycling and reusing the waste target to prepare the target material is greatly shortened, the production cost is saved, and large-scale production is easy to achieve; besides, in the recycling process, a small amount of strong acid is used, strong base and organic additives are not used, and environmental pollution is reduced.
本发明提供一种ITO废靶的回收再利用方法，所述回收再利用方法包括：将ITO废靶依次经预处理、真空除杂处理和破碎处理，得到ITO颗粒；将所述ITO颗粒经氧压烧结，得到ITO粉末；将所述ITO粉末依次经装模、包套焊接和脱气处理后，进行热等静压处理，得到ITO靶材。本发明所述回收再利用方法无需进行模压和冷等静压处理，大大缩短了废靶回收再利用制成靶材的周期，节约了生产成本，容易实现规模化生产；且回收再利用过程中少量使用强酸，不使用强碱及有机添加剂，减少了环境污染。
ITO waste target recycling method
The invention provides an ITO waste target recycling method, which comprises the following steps: sequentially carrying out pretreatment, vacuum impurity removal treatment and crushing treatment on an ITO waste target to obtain ITO particles; carrying out oxygen pressure sintering on the ITO particles to obtain ITO powder; and after the ITO powder is subjected to die filling, sheath welding and degassing treatment in sequence, and performing hot isostatic pressing treatment to obtain the ITO target material. According to the recycling and reusing method, mold pressing and cold isostatic pressing treatment are not needed, the period of recycling and reusing the waste target to prepare the target material is greatly shortened, the production cost is saved, and large-scale production is easy to achieve; besides, in the recycling process, a small amount of strong acid is used, strong base and organic additives are not used, and environmental pollution is reduced.
本发明提供一种ITO废靶的回收再利用方法，所述回收再利用方法包括：将ITO废靶依次经预处理、真空除杂处理和破碎处理，得到ITO颗粒；将所述ITO颗粒经氧压烧结，得到ITO粉末；将所述ITO粉末依次经装模、包套焊接和脱气处理后，进行热等静压处理，得到ITO靶材。本发明所述回收再利用方法无需进行模压和冷等静压处理，大大缩短了废靶回收再利用制成靶材的周期，节约了生产成本，容易实现规模化生产；且回收再利用过程中少量使用强酸，不使用强碱及有机添加剂，减少了环境污染。
ITO waste target recycling method
一种ITO废靶的回收再利用方法
YAO LIJUN (author) / PAN JIE (author) / BIAN YIJUN (author) / WANG XUEZE (author) / WU DONGQING (author) / LI JIAN (author)
2022-02-01
Patent
Electronic Resource
Chinese
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