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Composite oxide target material and preparation method thereof
The invention provides a composite oxide target material and a preparation method thereof. The target material comprises magnesium monoxide and titanium monoxide, the total amount of magnesium monoxide is 5 at%-90 at% and the total amount of titanium monoxide is 10 at%-95 at% based on the total number of atoms of the composite oxide target material; the average particle size of the magnesium oxide black phase in the composite oxide target material is less than or equal to 2 microns, and the particle size variation is less than 0.2. The invention also provides a method for manufacturing the composite oxide target material. The method comprises the following steps of: preparing magnesium monoxide powder with the particle size of less than or equal to 5 microns and titanium monoxide powder with the particle size of less than or equal to 10 microns; mixing the powder to obtain mixed powder; grinding the mixed powder for more than 48 hours to obtain refined powder; performing the refined powder to obtain a target blank; and sintering the target blank at 900-1400 DEG C to obtain the composite oxide target material.
本发明提供一种复合氧化物靶材及其制法。该靶材包含一氧化镁及一氧化钛，以复合氧化物靶材的原子总数为基准，一氧化镁的总量为5at％至90at％，一氧化钛的总量为10at％至95at％；该复合氧化物靶材中一氧化镁黑色相的平均粒径小于或等于2微米且粒径变异度小于0.2。本发明另提供制造前述复合氧化物靶材的方法，其包括：齐备粒径小于或等于5微米的一氧化镁粉末及粒径小于或等于10微米的一氧化钛粉末；混合上述粉末，以得到混合粉末；研磨该混合粉末48小时以上，以得到细化粉末；将该细化粉末进行预成型，以得到靶胚；及于900℃至1400℃下烧结该靶胚，以获得该复合氧化物靶材。
Composite oxide target material and preparation method thereof
The invention provides a composite oxide target material and a preparation method thereof. The target material comprises magnesium monoxide and titanium monoxide, the total amount of magnesium monoxide is 5 at%-90 at% and the total amount of titanium monoxide is 10 at%-95 at% based on the total number of atoms of the composite oxide target material; the average particle size of the magnesium oxide black phase in the composite oxide target material is less than or equal to 2 microns, and the particle size variation is less than 0.2. The invention also provides a method for manufacturing the composite oxide target material. The method comprises the following steps of: preparing magnesium monoxide powder with the particle size of less than or equal to 5 microns and titanium monoxide powder with the particle size of less than or equal to 10 microns; mixing the powder to obtain mixed powder; grinding the mixed powder for more than 48 hours to obtain refined powder; performing the refined powder to obtain a target blank; and sintering the target blank at 900-1400 DEG C to obtain the composite oxide target material.
本发明提供一种复合氧化物靶材及其制法。该靶材包含一氧化镁及一氧化钛，以复合氧化物靶材的原子总数为基准，一氧化镁的总量为5at％至90at％，一氧化钛的总量为10at％至95at％；该复合氧化物靶材中一氧化镁黑色相的平均粒径小于或等于2微米且粒径变异度小于0.2。本发明另提供制造前述复合氧化物靶材的方法，其包括：齐备粒径小于或等于5微米的一氧化镁粉末及粒径小于或等于10微米的一氧化钛粉末；混合上述粉末，以得到混合粉末；研磨该混合粉末48小时以上，以得到细化粉末；将该细化粉末进行预成型，以得到靶胚；及于900℃至1400℃下烧结该靶胚，以获得该复合氧化物靶材。
Composite oxide target material and preparation method thereof
复合氧化物靶材及其制法
CAI DENGAN (author) / CHEN YANREN (author) / ZHENG HUIWEN (author)
2022-10-28
Patent
Electronic Resource
Chinese
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