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The invention discloses an aluminum nitride substrate and a preparation method and application thereof, and relates to the technical field of nitride ceramics. The invention provides an aluminum nitride substrate. The aluminum nitride substrate comprises the following components in parts by weight: 100 parts of aluminum nitride, 2-9 parts of a sintering aid and 0.05-0.3 part of an inorganic carbon source, wherein the specific surface area of the inorganic carbon source is 40-100m < 2 >/g. According to the method, oxygen impurities in aluminum nitride crystal lattices are purified through reaction of the inorganic carbon source, the purpose of improving the heat conductivity of the aluminum nitride substrate is achieved, and the heat conductivity performance of the aluminum nitride substrate can be effectively improved.
本发明公开了一种氮化铝基板及其制备方法与应用，涉及氮化物陶瓷技术领域。本发明提供了一种氮化铝基板，包括以下重量份的组分：氮化铝100份、烧结助剂2‑9份、无机碳源0.05‑0.3份；其中，所述无机碳源的比表面积为40‑100m2/g。本发明利用无机碳源反应纯化氮化铝晶格中氧杂质的方法，达到提高氮化铝基板热导率的目的，可有效提升氮化铝基板的热导率性能。
The invention discloses an aluminum nitride substrate and a preparation method and application thereof, and relates to the technical field of nitride ceramics. The invention provides an aluminum nitride substrate. The aluminum nitride substrate comprises the following components in parts by weight: 100 parts of aluminum nitride, 2-9 parts of a sintering aid and 0.05-0.3 part of an inorganic carbon source, wherein the specific surface area of the inorganic carbon source is 40-100m < 2 >/g. According to the method, oxygen impurities in aluminum nitride crystal lattices are purified through reaction of the inorganic carbon source, the purpose of improving the heat conductivity of the aluminum nitride substrate is achieved, and the heat conductivity performance of the aluminum nitride substrate can be effectively improved.
本发明公开了一种氮化铝基板及其制备方法与应用，涉及氮化物陶瓷技术领域。本发明提供了一种氮化铝基板，包括以下重量份的组分：氮化铝100份、烧结助剂2‑9份、无机碳源0.05‑0.3份；其中，所述无机碳源的比表面积为40‑100m2/g。本发明利用无机碳源反应纯化氮化铝晶格中氧杂质的方法，达到提高氮化铝基板热导率的目的，可有效提升氮化铝基板的热导率性能。
Aluminum nitride substrate and preparation method and application thereof
一种氮化铝基板及其制备方法与应用
2022-11-08
Patent
Electronic Resource
Chinese
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