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The invention belongs to the technical field of nitride ceramic preparation, and particularly discloses an aluminum nitride substrate and a preparation method and application thereof. According to the method, the surface of the aluminum nitride green body is coated or sprayed with the adhesion isolation powder, on the premise of basic adhesion isolation, a reducing environment can be created in the glue discharging or low-temperature sintering process of the aluminum nitride green body sheet, the content of oxygen impurities and the content of a second phase in the aluminum nitride substrate are reduced, and the heat conductivity and strength of the aluminum nitride substrate are improved. The thermal conductivity of the aluminum nitride substrate is more than 205W/(m.k), and the strength is more than 400MPa.
本发明属于氮化物陶瓷制备技术领域，具体公开一种氮化铝基板及其制备方法与应用。本发明通过在氮化铝生坯表面涂覆或喷涂隔粘粉的方式，在基础隔粘的前提下，能够在氮化铝生坯片排胶或低温烧结过程中制造还原性环境，降低氮化铝基板中的氧杂质及第二相的含量，提高其导热率及强度。本发明的氮化铝基板的热导率在205W/(m·k)以上，强度在400MPa以上。
The invention belongs to the technical field of nitride ceramic preparation, and particularly discloses an aluminum nitride substrate and a preparation method and application thereof. According to the method, the surface of the aluminum nitride green body is coated or sprayed with the adhesion isolation powder, on the premise of basic adhesion isolation, a reducing environment can be created in the glue discharging or low-temperature sintering process of the aluminum nitride green body sheet, the content of oxygen impurities and the content of a second phase in the aluminum nitride substrate are reduced, and the heat conductivity and strength of the aluminum nitride substrate are improved. The thermal conductivity of the aluminum nitride substrate is more than 205W/(m.k), and the strength is more than 400MPa.
本发明属于氮化物陶瓷制备技术领域，具体公开一种氮化铝基板及其制备方法与应用。本发明通过在氮化铝生坯表面涂覆或喷涂隔粘粉的方式，在基础隔粘的前提下，能够在氮化铝生坯片排胶或低温烧结过程中制造还原性环境，降低氮化铝基板中的氧杂质及第二相的含量，提高其导热率及强度。本发明的氮化铝基板的热导率在205W/(m·k)以上，强度在400MPa以上。
Aluminum nitride substrate and preparation method and application thereof
一种氮化铝基板及其制备方法与应用
2023-07-14
Patent
Electronic Resource
Chinese
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