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Preparation method of doped molybdenum target material
The invention discloses a preparation method of a doped molybdenum target, and belongs to the technical field of target preparation, and the preparation method comprises the following steps: adding polyvinylpyrrolidone and polyethylene glycol into deionized water, stirring and dissolving, adding molybdenum oxide powder and sodium molybdate dehydrate, and carrying out ball milling and spray drying to obtain sodium-doped molybdenum powder; bismuth oxide powder and absolute ethyl alcohol are added into the sodium-doped molybdenum powder, spray drying treatment is carried out after ball milling, and green body powder is obtained; according to the preparation method, the molybdenum oxide powder and the sodium molybdate dehydrate are used as raw materials, the polyvinylpyrrolidone is used as a binding agent, the polyethylene glycol is used as a dispersing agent, the sodium-doped molybdenum powder is obtained, the components are uniform, and the shape is good; according to the method, grain boundary movement in the sintering forming process of the target material can be enhanced, grain growth is promoted, gaps in the material are reduced, and the adhesion of powder and the compactness of the target material are effectively improved.
本发明公开了一种掺杂型钼靶材的制备方法，属于靶材制备技术领域，包括以下步骤：将聚乙烯吡咯烷酮和聚乙二醇加入去离子水中搅拌溶解，加入氧化钼粉和二水合钼酸钠，球磨，喷雾干燥，得到钠掺杂钼粉；向钠掺杂钼粉中加入氧化铋粉和无水乙醇，球磨后进行喷雾干燥处理，得到坯体粉料；经过低压预压制和烧结成型，得到掺杂型钼靶材，本发明以氧化钼粉和二水合钼酸钠为原料，以聚乙烯吡咯烷酮为粘结剂，聚乙二醇为分散剂，得到钠掺杂钼粉，组分均一，形态良好，本发明在坯体粉料中引入了助熔剂氧化铋粉，可以增强靶材烧结成型过程中的晶界运动，促进晶粒生长，降低材料内部的空隙，有效提高粉体的粘接性和靶材的致密度。
Preparation method of doped molybdenum target material
The invention discloses a preparation method of a doped molybdenum target, and belongs to the technical field of target preparation, and the preparation method comprises the following steps: adding polyvinylpyrrolidone and polyethylene glycol into deionized water, stirring and dissolving, adding molybdenum oxide powder and sodium molybdate dehydrate, and carrying out ball milling and spray drying to obtain sodium-doped molybdenum powder; bismuth oxide powder and absolute ethyl alcohol are added into the sodium-doped molybdenum powder, spray drying treatment is carried out after ball milling, and green body powder is obtained; according to the preparation method, the molybdenum oxide powder and the sodium molybdate dehydrate are used as raw materials, the polyvinylpyrrolidone is used as a binding agent, the polyethylene glycol is used as a dispersing agent, the sodium-doped molybdenum powder is obtained, the components are uniform, and the shape is good; according to the method, grain boundary movement in the sintering forming process of the target material can be enhanced, grain growth is promoted, gaps in the material are reduced, and the adhesion of powder and the compactness of the target material are effectively improved.
本发明公开了一种掺杂型钼靶材的制备方法，属于靶材制备技术领域，包括以下步骤：将聚乙烯吡咯烷酮和聚乙二醇加入去离子水中搅拌溶解，加入氧化钼粉和二水合钼酸钠，球磨，喷雾干燥，得到钠掺杂钼粉；向钠掺杂钼粉中加入氧化铋粉和无水乙醇，球磨后进行喷雾干燥处理，得到坯体粉料；经过低压预压制和烧结成型，得到掺杂型钼靶材，本发明以氧化钼粉和二水合钼酸钠为原料，以聚乙烯吡咯烷酮为粘结剂，聚乙二醇为分散剂，得到钠掺杂钼粉，组分均一，形态良好，本发明在坯体粉料中引入了助熔剂氧化铋粉，可以增强靶材烧结成型过程中的晶界运动，促进晶粒生长，降低材料内部的空隙，有效提高粉体的粘接性和靶材的致密度。
Preparation method of doped molybdenum target material
一种掺杂型钼靶材的制备方法
ZHANG LILAN (author) / YANG BIAO (author) / ZHONG XIAOHUA (author) / GAO JIANCHENG (author)
2023-07-18
Patent
Electronic Resource
Chinese
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