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Capacitive pressure sensor and preparation method thereof
The invention relates to the technical field of pressure sensors, in particular to a polymer precursor conversion ceramic capacitive pressure sensor and a preparation method thereof. The capacitive pressure sensor comprises an upper pole plate and a lower pole plate, the lower surface of the upper pole plate and the upper surface of the lower pole plate are respectively provided with micron-sized array column structures with corresponding positions, the micron-sized array column structures form a micro-array composite electrode, and the micron-sized array column structures are connected with wires. According to the capacitive pressure sensor, the characteristics of corrosion resistance, high temperature resistance, high strength and the like of ceramic are combined with the characteristics of high sensitivity, long service life and the like of a capacitor, the advantages of the ceramic and the capacitor structure are combined, and the capacitive pressure sensor is widely applied to the high-temperature extreme environment.
本发明涉及压力传感器技术领域，具体涉及一种聚合物先驱体转化陶瓷电容式压力传感器及其制备方法。该电容式压力传感器包括上极板和下极板，上极板的下表面和下极板的上表面分别设置了位置对应的微米级阵列柱结构，微米级阵列柱结构形成了微阵列复合电极，微米级阵列柱结构连接有导线。本发明的电容式压力传感器将陶瓷的耐腐蚀、耐高温、高强度等特性与电容的高灵敏度、长寿命等特点相结合，兼具了陶瓷与电容结构的优点，在高温极端环境中得到广泛应用。
Capacitive pressure sensor and preparation method thereof
The invention relates to the technical field of pressure sensors, in particular to a polymer precursor conversion ceramic capacitive pressure sensor and a preparation method thereof. The capacitive pressure sensor comprises an upper pole plate and a lower pole plate, the lower surface of the upper pole plate and the upper surface of the lower pole plate are respectively provided with micron-sized array column structures with corresponding positions, the micron-sized array column structures form a micro-array composite electrode, and the micron-sized array column structures are connected with wires. According to the capacitive pressure sensor, the characteristics of corrosion resistance, high temperature resistance, high strength and the like of ceramic are combined with the characteristics of high sensitivity, long service life and the like of a capacitor, the advantages of the ceramic and the capacitor structure are combined, and the capacitive pressure sensor is widely applied to the high-temperature extreme environment.
本发明涉及压力传感器技术领域，具体涉及一种聚合物先驱体转化陶瓷电容式压力传感器及其制备方法。该电容式压力传感器包括上极板和下极板，上极板的下表面和下极板的上表面分别设置了位置对应的微米级阵列柱结构，微米级阵列柱结构形成了微阵列复合电极，微米级阵列柱结构连接有导线。本发明的电容式压力传感器将陶瓷的耐腐蚀、耐高温、高强度等特性与电容的高灵敏度、长寿命等特点相结合，兼具了陶瓷与电容结构的优点，在高温极端环境中得到广泛应用。
Capacitive pressure sensor and preparation method thereof
一种电容式压力传感器及其制备方法
SHAO GANG (author) / XIONG CHUNYUE (author) / MA CHAO (author) / HAN DAOYANG (author) / JIANG JUNPENG (author) / WANG HAILONG (author) / ZHANG RUI (author)
2023-08-01
Patent
Electronic Resource
Chinese
IPC:
G01L
Messen von Kraft, mechanischer Spannung, Drehmoment, Arbeit, mechanischer Leistung, mechanischem Wirkungsgrad oder des Drucks von Fluiden
,
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
/
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
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