A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Oxide target material and preparation method and application thereof
The invention provides an oxide target material and a preparation method and application thereof, and the preparation method comprises the following steps: mixing a metal oxide, a lithium source and a solvent to obtain a lithium-containing metal oxide; carrying out primary sintering, briquetting and secondary sintering on the lithium-containing metal oxide to obtain the oxide target material, according to the preparation method, lithium ions can be successfully doped in the preparation process, the lithium-containing oxide target material is prepared, the defects that the lithium ions are active and are not easy to be doped, and an oxide thin film prepared by magnetron sputtering is relatively low in conductivity and photoelectrochemical property are overcome, and the conductivity and the photoelectrochemical property of the oxide thin film are remarkably improved.
本发明提供了一种氧化物靶材及其制备方法与应用，所述制备方法包括如下步骤：混合金属氧化物、锂源和溶剂，得到含锂的金属氧化物；将含锂的金属氧化物进行一次烧结、压块和二次烧结得到所述氧化物靶材；所述制备方法能在制备过程中成功掺杂锂离子，制备得到含锂的氧化物靶材，解决了锂离子活泼不易掺入，以及磁控溅射制备的氧化物薄膜存在电导率和光电化学性质较低的缺陷，显着提升了氧化物薄膜的电导率和光电化学性质。
Oxide target material and preparation method and application thereof
The invention provides an oxide target material and a preparation method and application thereof, and the preparation method comprises the following steps: mixing a metal oxide, a lithium source and a solvent to obtain a lithium-containing metal oxide; carrying out primary sintering, briquetting and secondary sintering on the lithium-containing metal oxide to obtain the oxide target material, according to the preparation method, lithium ions can be successfully doped in the preparation process, the lithium-containing oxide target material is prepared, the defects that the lithium ions are active and are not easy to be doped, and an oxide thin film prepared by magnetron sputtering is relatively low in conductivity and photoelectrochemical property are overcome, and the conductivity and the photoelectrochemical property of the oxide thin film are remarkably improved.
本发明提供了一种氧化物靶材及其制备方法与应用，所述制备方法包括如下步骤：混合金属氧化物、锂源和溶剂，得到含锂的金属氧化物；将含锂的金属氧化物进行一次烧结、压块和二次烧结得到所述氧化物靶材；所述制备方法能在制备过程中成功掺杂锂离子，制备得到含锂的氧化物靶材，解决了锂离子活泼不易掺入，以及磁控溅射制备的氧化物薄膜存在电导率和光电化学性质较低的缺陷，显着提升了氧化物薄膜的电导率和光电化学性质。
Oxide target material and preparation method and application thereof
一种氧化物靶材及其制备方法与应用
YAO LIJUN (author) / PAN JIE (author) / YAO SHUN (author) / WANG YUCONG (author) / SHEN DONGDONG (author) / FAN XIN (author)
2023-08-22
Patent
Electronic Resource
Chinese
Oxide sintered body, preparation method thereof, oxide target material and application
| European Patent Office | 2024
Metal oxide target material and preparation method and application thereof
| European Patent Office | 2023