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Aluminum nitride heater with low resistance temperature coefficient and preparation method thereof
The invention discloses an aluminum nitride heater with a low resistance temperature coefficient and a preparation method thereof, the aluminum nitride heater comprises a first aluminum nitride substrate, a heating circuit, a second aluminum nitride substrate and a wire, and the wire is electrically connected with the heating circuit; the heating circuit is arranged between the first aluminum nitride substrate and the second aluminum nitride substrate, the heating circuit is formed by printing metal slurry, and metals contained in the metal slurry comprise W, Mo, AlN and WC/WC-TiC. According to the preparation method, metal slurry is used for printing a corresponding heating circuit on an aluminum nitride green sheet, the metal slurry used for printing is correspondingly selected according to different product characteristics, and metal contained in the metal slurry comprises W, Mo, AlN and WC/WC-TiC; according to the invention, the heating circuit slurry is optimally designed, and the resistance temperature coefficient of the heating circuit slurry is reduced, so that the thermal stress of a product is reduced under the same heating voltage, higher power density can be obtained, and the energy utilization rate is improved.
本发明公开了一种低电阻温度系数的氮化铝加热器及其制备方法，该氮化铝加热器包括第一氮化铝基板、加热电路、第二氮化铝基板和导线，所述导线与加热电路电性连接；加热电路设于第一氮化铝基板和第二氮化铝基板之间，其中，所述加热电路由金属浆料印刷而成，所述金属浆料中所含金属包括W、Mo、AlN和WC/WC‑TiC。该制备方法中使用金属浆料在氮化铝生坯片上印刷相应的加热电路，印刷使用的金属浆料根据不同产品特性进行相应选择，其中，所述金属浆料中所含金属包括W、Mo、AlN和WC/WC‑TiC；本发明对加热电路浆料进行优化设计，降低加热线路浆料的电阻温度系数，进而在相同加热电压下降低了产品热应力，也可获得更高的功率密度，提高能量利用率。
Aluminum nitride heater with low resistance temperature coefficient and preparation method thereof
The invention discloses an aluminum nitride heater with a low resistance temperature coefficient and a preparation method thereof, the aluminum nitride heater comprises a first aluminum nitride substrate, a heating circuit, a second aluminum nitride substrate and a wire, and the wire is electrically connected with the heating circuit; the heating circuit is arranged between the first aluminum nitride substrate and the second aluminum nitride substrate, the heating circuit is formed by printing metal slurry, and metals contained in the metal slurry comprise W, Mo, AlN and WC/WC-TiC. According to the preparation method, metal slurry is used for printing a corresponding heating circuit on an aluminum nitride green sheet, the metal slurry used for printing is correspondingly selected according to different product characteristics, and metal contained in the metal slurry comprises W, Mo, AlN and WC/WC-TiC; according to the invention, the heating circuit slurry is optimally designed, and the resistance temperature coefficient of the heating circuit slurry is reduced, so that the thermal stress of a product is reduced under the same heating voltage, higher power density can be obtained, and the energy utilization rate is improved.
本发明公开了一种低电阻温度系数的氮化铝加热器及其制备方法，该氮化铝加热器包括第一氮化铝基板、加热电路、第二氮化铝基板和导线，所述导线与加热电路电性连接；加热电路设于第一氮化铝基板和第二氮化铝基板之间，其中，所述加热电路由金属浆料印刷而成，所述金属浆料中所含金属包括W、Mo、AlN和WC/WC‑TiC。该制备方法中使用金属浆料在氮化铝生坯片上印刷相应的加热电路，印刷使用的金属浆料根据不同产品特性进行相应选择，其中，所述金属浆料中所含金属包括W、Mo、AlN和WC/WC‑TiC；本发明对加热电路浆料进行优化设计，降低加热线路浆料的电阻温度系数，进而在相同加热电压下降低了产品热应力，也可获得更高的功率密度，提高能量利用率。
Aluminum nitride heater with low resistance temperature coefficient and preparation method thereof
一种低电阻温度系数的氮化铝加热器及其制备方法
WU XIYONG (author) / CHEN JIANGUO (author) / PAN XINQIN (author) / QI YU (author) / WU YIFAN (author) / YAN YUHUI (author)
2023-09-15
Patent
Electronic Resource
Chinese
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