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Preparation method of non-stoichiometric molybdenum oxide target material with controllable molybdenum-oxygen ratio
The invention discloses a preparation method of a non-stoichiometric molybdenum oxide target material with a controllable molybdenum-oxygen ratio. The preparation method comprises the following steps: S1, calcining ammonium molybdate to obtain MoO3 powder; s2, the MoO3 powder reacts with hydrogen, and non-stoichiometric molybdenum oxide powder is obtained; in the non-stoichiometric molybdenum oxide powder, the mass content of Mo9O26 is 0%-99%, the mass content of Mo4O11 is 20%-86%, and the mass content of MoO2 is 0%-40%; s3, non-stoichiometric molybdenum oxide powder is subjected to compression molding; and S4, the formed non-stoichiometric molybdenum oxide powder is sintered under set conditions, the non-stoichiometric molybdenum oxide target material with the specific molybdenum-oxygen ratio is obtained, and the ratio of molybdenum atoms to oxygen atoms is 1: (2-3). The preparation method of the non-stoichiometric molybdenum oxide target material with the controllable molybdenum-oxygen ratio, disclosed by the invention, is simple in preparation process and controllable in reaction condition, and the prepared non-stoichiometric molybdenum oxide target material is good in compactness.
本发明公开了一种钼氧比可控的非化学计量氧化钼靶材的制备方法。该制备方法包括：S1、煅烧钼酸铵得到MoO3粉末；S2、MoO3粉末与氢气发生反应，得到非化学计量比钼氧化物粉体；非化学计量比钼氧化物粉体中，Mo9O26的质量含量为0％～99％，Mo4O11的质量含量为20％～86％，MoO2的质量含量为0％～40％；S3、非化学计量比钼氧化物粉体模压成型；S4、成型的非化学计量比钼氧化物粉体在设定条件下烧结，得到特定钼氧比的非化学计量氧化钼靶材，其中，钼原子与氧原子比为1：2～3。本发明公开的钼氧比可控的非化学计量氧化钼靶材的制备方法，其制备工艺简单，反应条件可控，制备得到的非化学计量氧化钼靶材致密性好。
Preparation method of non-stoichiometric molybdenum oxide target material with controllable molybdenum-oxygen ratio
The invention discloses a preparation method of a non-stoichiometric molybdenum oxide target material with a controllable molybdenum-oxygen ratio. The preparation method comprises the following steps: S1, calcining ammonium molybdate to obtain MoO3 powder; s2, the MoO3 powder reacts with hydrogen, and non-stoichiometric molybdenum oxide powder is obtained; in the non-stoichiometric molybdenum oxide powder, the mass content of Mo9O26 is 0%-99%, the mass content of Mo4O11 is 20%-86%, and the mass content of MoO2 is 0%-40%; s3, non-stoichiometric molybdenum oxide powder is subjected to compression molding; and S4, the formed non-stoichiometric molybdenum oxide powder is sintered under set conditions, the non-stoichiometric molybdenum oxide target material with the specific molybdenum-oxygen ratio is obtained, and the ratio of molybdenum atoms to oxygen atoms is 1: (2-3). The preparation method of the non-stoichiometric molybdenum oxide target material with the controllable molybdenum-oxygen ratio, disclosed by the invention, is simple in preparation process and controllable in reaction condition, and the prepared non-stoichiometric molybdenum oxide target material is good in compactness.
本发明公开了一种钼氧比可控的非化学计量氧化钼靶材的制备方法。该制备方法包括：S1、煅烧钼酸铵得到MoO3粉末；S2、MoO3粉末与氢气发生反应，得到非化学计量比钼氧化物粉体；非化学计量比钼氧化物粉体中，Mo9O26的质量含量为0％～99％，Mo4O11的质量含量为20％～86％，MoO2的质量含量为0％～40％；S3、非化学计量比钼氧化物粉体模压成型；S4、成型的非化学计量比钼氧化物粉体在设定条件下烧结，得到特定钼氧比的非化学计量氧化钼靶材，其中，钼原子与氧原子比为1：2～3。本发明公开的钼氧比可控的非化学计量氧化钼靶材的制备方法，其制备工艺简单，反应条件可控，制备得到的非化学计量氧化钼靶材致密性好。
Preparation method of non-stoichiometric molybdenum oxide target material with controllable molybdenum-oxygen ratio
钼氧比可控的非化学计量氧化钼靶材的制备方法
YANG KAIJUN (author) / XU XIAOQING (author) / LI QINGKUI (author) / WU XIAOCHAO (author) / LI YUJING (author) / ZHU JINPENG (author) / SUN BENSHUANG (author) / WANG CHENGDUO (author) / HE JILIN (author)
2023-11-28
Patent
Electronic Resource
Chinese
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