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Alumina sintered body and electrostatic chuck
The alumina-based sintered body has alumina (Al2O3) as the main component, and the content of magnesium oxide (MgO) is 0.00 mol% lt with respect to the content of alumina. MgO < = 0.20 mol%, the density of the alumina sintered body is 3.96 g/cm < 3 > or more, and the standard deviation of the particle size of alumina crystal grains is less than 4.0 [mu] m.
一种氧化铝质烧结体，其以氧化铝(Al2O3)为主成分，氧化镁(MgO)的含量相对于氧化铝的含量为0.00mol％
Alumina sintered body and electrostatic chuck
The alumina-based sintered body has alumina (Al2O3) as the main component, and the content of magnesium oxide (MgO) is 0.00 mol% lt with respect to the content of alumina. MgO < = 0.20 mol%, the density of the alumina sintered body is 3.96 g/cm < 3 > or more, and the standard deviation of the particle size of alumina crystal grains is less than 4.0 [mu] m.
一种氧化铝质烧结体，其以氧化铝(Al2O3)为主成分，氧化镁(MgO)的含量相对于氧化铝的含量为0.00mol％
Alumina sintered body and electrostatic chuck
氧化铝质烧结体和静电卡盘
HOTTA MOTOKI (author) / MATSUOKA TAKAYUKI (author) / OGAWA TAKAMICHI (author)
2024-05-14
Patent
Electronic Resource
Chinese