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    ALUMINA-BASED SINTERED BODY AND ELECTROSTATIC CHUCK

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    In an alumina-based sintered body containing alumina (Al2O3) as a main component and containing magnesia (MgO) whose content with respect to a content of the alumina is 0.00 mol %

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    ALUMINA-BASED SINTERED BODY AND ELECTROSTATIC CHUCK

    New search for: HOTTA MOTOKI
    New search for: MATSUOKA TAKAYUKI
    New search for: OGAWA TAKAMICHI

    In an alumina-based sintered body containing alumina (Al2O3) as a main component and containing magnesia (MgO) whose content with respect to a content of the alumina is 0.00 mol %

    Access

    Download

    ALUMINA-BASED SINTERED BODY AND ELECTROSTATIC CHUCK

    New search for: HOTTA MOTOKI
    New search for: MATSUOKA TAKAYUKI
    New search for: OGAWA TAKAMICHI

    In an alumina-based sintered body containing alumina (Al2O3) as a main component and containing magnesia (MgO) whose content with respect to a content of the alumina is 0.00 mol %

    Access

    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    ALUMINA-BASED SINTERED BODY AND ELECTROSTATIC CHUCK

    Contributors:

    HOTTA MOTOKI (author) / MATSUOKA TAKAYUKI (author) / OGAWA TAKAMICHI (author)

    Publication date:

    2024-12-12

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  C04B Kalk , LIME / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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