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    SINTERED ALUMINA MATERIAL AND ELECTROSTATIC CHUCK

    New search for: HOTTA MOTOKI
    New search for: TANGE HIDEO
    New search for: YURI SHINJI
    New search for: KATSU YUSUKE

    Provided is a technology for suppressing production of particles in an alumina-based sintered body. The alumina-based sintered body contains not smaller than 90 ppm and not greater than 265 ppm of yttrium (Y), and not greater than 100 ppm of calcium (Ca), and an average grain size of alumina crystal grains is not greater than 6 μm.

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    SINTERED ALUMINA MATERIAL AND ELECTROSTATIC CHUCK

    New search for: HOTTA MOTOKI
    New search for: TANGE HIDEO
    New search for: YURI SHINJI
    New search for: KATSU YUSUKE

    Provided is a technology for suppressing production of particles in an alumina-based sintered body. The alumina-based sintered body contains not smaller than 90 ppm and not greater than 265 ppm of yttrium (Y), and not greater than 100 ppm of calcium (Ca), and an average grain size of alumina crystal grains is not greater than 6 μm.

    Access

    Download

    SINTERED ALUMINA MATERIAL AND ELECTROSTATIC CHUCK

    New search for: HOTTA MOTOKI
    New search for: TANGE HIDEO
    New search for: YURI SHINJI
    New search for: KATSU YUSUKE

    Provided is a technology for suppressing production of particles in an alumina-based sintered body. The alumina-based sintered body contains not smaller than 90 ppm and not greater than 265 ppm of yttrium (Y), and not greater than 100 ppm of calcium (Ca), and an average grain size of alumina crystal grains is not greater than 6 μm.

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    Document information
    Similar titles

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    Document information
    Title:

    SINTERED ALUMINA MATERIAL AND ELECTROSTATIC CHUCK

    Contributors:

    HOTTA MOTOKI (author) / TANGE HIDEO (author) / YURI SHINJI (author) / KATSU YUSUKE (author)

    Publication date:

    2025-02-06

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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