A platform for research: civil engineering, architecture and urbanism
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The invention relates to silicon carbide ceramic and a preparation method thereof and a semiconductor device, the preparation method of the silicon carbide ceramic comprises the following steps: dispersing silicon carbide powder, a sintering aid and organic resin in a solvent, and carrying out homogenization treatment to obtain a mixture; then, the mixture is dried under stirring, and modified silicon carbide powder is obtained; the modified silicon carbide powder and a binder are sequentially subjected to mixing granulation, forming treatment, degreasing treatment and sintering treatment; the adhesive comprises the following components in parts by mass: 80-95 parts of a component A, 3-15 parts of a component B and 1-8 parts of a component C, the component A is polyformaldehyde; the component B is selected from at least one of polypropylene, polystyrene, polyethylene, polymethyl methacrylate and ethylene-vinyl acetate copolymer; and the component C is selected from at least one of stearic acid, zinc stearate, dioctyl phthalate and dibutyl phthalate. According to the method, the silicon carbide ceramic with relatively high purity and compactness can be obtained.
本申请涉及一种碳化硅陶瓷及其制备方法与半导体器件，该碳化硅陶瓷的制备方法包括：将碳化硅粉、烧结助剂及有机树脂分散于溶剂中，进行均质处理，得到混合料；然后对混合料在搅拌下进行干燥处理，得到改性碳化硅粉；将改性碳化硅粉与粘结剂依次进行混炼造粒、成型处理、脱脂处理及烧结处理；按质量份数计，粘接剂包括80份~95份的A组分、3份~15份的B组分及1份~8份的C组分；A组分为聚甲醛；所述B组分选自聚丙烯、聚苯乙烯、聚乙烯、聚甲基丙烯酸甲酯及乙烯‑醋酸乙烯共聚物中的至少一种；所述C组分选自硬脂酸、硬脂酸锌、邻苯二甲酸二辛酯及邻苯二甲酸二丁酯中的至少一种。通过上述方法能得到纯度和致密化度均较高的碳化硅陶瓷。
The invention relates to silicon carbide ceramic and a preparation method thereof and a semiconductor device, the preparation method of the silicon carbide ceramic comprises the following steps: dispersing silicon carbide powder, a sintering aid and organic resin in a solvent, and carrying out homogenization treatment to obtain a mixture; then, the mixture is dried under stirring, and modified silicon carbide powder is obtained; the modified silicon carbide powder and a binder are sequentially subjected to mixing granulation, forming treatment, degreasing treatment and sintering treatment; the adhesive comprises the following components in parts by mass: 80-95 parts of a component A, 3-15 parts of a component B and 1-8 parts of a component C, the component A is polyformaldehyde; the component B is selected from at least one of polypropylene, polystyrene, polyethylene, polymethyl methacrylate and ethylene-vinyl acetate copolymer; and the component C is selected from at least one of stearic acid, zinc stearate, dioctyl phthalate and dibutyl phthalate. According to the method, the silicon carbide ceramic with relatively high purity and compactness can be obtained.
本申请涉及一种碳化硅陶瓷及其制备方法与半导体器件，该碳化硅陶瓷的制备方法包括：将碳化硅粉、烧结助剂及有机树脂分散于溶剂中，进行均质处理，得到混合料；然后对混合料在搅拌下进行干燥处理，得到改性碳化硅粉；将改性碳化硅粉与粘结剂依次进行混炼造粒、成型处理、脱脂处理及烧结处理；按质量份数计，粘接剂包括80份~95份的A组分、3份~15份的B组分及1份~8份的C组分；A组分为聚甲醛；所述B组分选自聚丙烯、聚苯乙烯、聚乙烯、聚甲基丙烯酸甲酯及乙烯‑醋酸乙烯共聚物中的至少一种；所述C组分选自硬脂酸、硬脂酸锌、邻苯二甲酸二辛酯及邻苯二甲酸二丁酯中的至少一种。通过上述方法能得到纯度和致密化度均较高的碳化硅陶瓷。
Silicon carbide ceramic, preparation method thereof and semiconductor device
碳化硅陶瓷及其制备方法与半导体器件
2024-06-25
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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