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Low-temperature rapid sintering preparation method of sodium molybdenum ceramic target material
The invention discloses a low-temperature rapid sintering preparation method of a sodium molybdenum ceramic target material, which specifically comprises the following steps of: ball-milling and mixing molybdenum trioxide powder and sodium molybdate dehydrate powder which are used as raw materials and alcohol which is used as a medium to obtain sodium molybdenum slurry; then drying, filtering, grinding and sieving the sodium molybdenum slurry to obtain sodium molybdenum powder; wetting the sodium molybdenum powder with an ammonium molybdate solution; the wetted molybdenum sodium powder is put into a graphite mold for pre-pressing forming, a biscuit obtained after pre-pressing forming is put into a sintering furnace along with the graphite mold, and spark plasma auxiliary cold sintering is carried out at the temperature of 200-400 DEG C and the high pressure of 50 MPa to obtain a sintered body of the target material; carrying out mechanical polishing and ultrasonic oscillation on the sintered body to obtain a semi-finished target material; and the semi-finished product target material and the copper back plate are bound together through brazing, and the molybdenum-sodium ceramic target material is obtained through cleaning, drying and vacuum packaging. The molybdenum sodium ceramic target material with high purity and high density can be prepared through rapid sintering at low temperature (5 min).
本发明公开了一种钼钠陶瓷靶材低温、快速烧结制备方法，具体为先将三氧化钼粉末、二水钼酸钠粉末为原料，以酒精为介质经过球磨混合后，获得钼钠料浆；然后将钼钠料浆经过干燥、过滤、研磨、过筛处理后，得到钼钠粉末；之后将钼钠粉末用钼酸铵溶液润湿；将润湿后的钼钠粉末放入石墨模具预压成型，将预压成型后的素坯随石墨模具一同置于烧结炉中，在200℃~400℃的温度下、50 MPa高压下经过放电等离子辅助冷烧结得到靶材的烧结体；将烧结体进行机械抛光和超声震荡，得到半成品靶材；将半成品靶材和铜背板经钎焊绑定在一起，经清洗、干燥、真空封装，即得到钼钠陶瓷靶材。本发明能在低温下快速（5 min）烧结制备出高纯度、高致密度的钼钠陶瓷靶材。
Low-temperature rapid sintering preparation method of sodium molybdenum ceramic target material
The invention discloses a low-temperature rapid sintering preparation method of a sodium molybdenum ceramic target material, which specifically comprises the following steps of: ball-milling and mixing molybdenum trioxide powder and sodium molybdate dehydrate powder which are used as raw materials and alcohol which is used as a medium to obtain sodium molybdenum slurry; then drying, filtering, grinding and sieving the sodium molybdenum slurry to obtain sodium molybdenum powder; wetting the sodium molybdenum powder with an ammonium molybdate solution; the wetted molybdenum sodium powder is put into a graphite mold for pre-pressing forming, a biscuit obtained after pre-pressing forming is put into a sintering furnace along with the graphite mold, and spark plasma auxiliary cold sintering is carried out at the temperature of 200-400 DEG C and the high pressure of 50 MPa to obtain a sintered body of the target material; carrying out mechanical polishing and ultrasonic oscillation on the sintered body to obtain a semi-finished target material; and the semi-finished product target material and the copper back plate are bound together through brazing, and the molybdenum-sodium ceramic target material is obtained through cleaning, drying and vacuum packaging. The molybdenum sodium ceramic target material with high purity and high density can be prepared through rapid sintering at low temperature (5 min).
本发明公开了一种钼钠陶瓷靶材低温、快速烧结制备方法，具体为先将三氧化钼粉末、二水钼酸钠粉末为原料，以酒精为介质经过球磨混合后，获得钼钠料浆；然后将钼钠料浆经过干燥、过滤、研磨、过筛处理后，得到钼钠粉末；之后将钼钠粉末用钼酸铵溶液润湿；将润湿后的钼钠粉末放入石墨模具预压成型，将预压成型后的素坯随石墨模具一同置于烧结炉中，在200℃~400℃的温度下、50 MPa高压下经过放电等离子辅助冷烧结得到靶材的烧结体；将烧结体进行机械抛光和超声震荡，得到半成品靶材；将半成品靶材和铜背板经钎焊绑定在一起，经清洗、干燥、真空封装，即得到钼钠陶瓷靶材。本发明能在低温下快速（5 min）烧结制备出高纯度、高致密度的钼钠陶瓷靶材。
Low-temperature rapid sintering preparation method of sodium molybdenum ceramic target material
一种钼钠陶瓷靶材低温、快速烧结制备方法
LI BIN (author) / LI ZHAOYANG (author) / LI JIWEN (author) / SHANGGUAN LINJIAN (author) / NIE FUQUAN (author) / REN ERZHOU (author) / HOU SHAOSHUAI (author) / ZHAO YIMAN (author) / XIONG HAO (author) / YE HAICHAO (author)
2024-07-12
Patent
Electronic Resource
Chinese
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